Wolfgang Vollrath

Person

Burbach, DE

People

Patents Grantslast 30 patents

Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for evaluating defects in the edge area of a wafe...
- Patent number 8,089,622
- Issue date Jan 3, 2012
- Vistec Semiconductor Systems GmbH
- Andreas Birkner
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for measuring feature widths on masks for the semiconduct...
- Patent number 7,375,792
- Issue date May 20, 2008
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting a semiconductor component
- Patent number 7,268,867
- Issue date Sep 11, 2007
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Grant
Illumination device for a DUV microscope and DUV microscope
- Patent number 6,624,930
- Issue date Sep 23, 2003
- Leica Microsystems Wetzlar GmbH
- Lambert Danner
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION...
- Publication number 20090279080
- Publication date Nov 12, 2009
- Vistec Semiconductor Systems GmbH
- Lambert Danner
- G01 - MEASURING TESTING
Information Patent Application
Dark Field Objective for a Microscope
- Publication number 20090225414
- Publication date Sep 10, 2009
- Michael Heiden
- G02 - OPTICS
Information Patent Application
Device and method for scanning the whole surface of a wafer
- Publication number 20090034832
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFE...
- Publication number 20080232672
- Publication date Sep 25, 2008
- Vistec Semiconductor Systems GmbH
- Andreas Birkner
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20080144025
- Publication date Jun 19, 2008
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20080144014
- Publication date Jun 19, 2008
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
Method for Selecting a Wavelength, and a Microscope
- Publication number 20080062510
- Publication date Mar 13, 2008
- Vistec Semiconductor Systems GmbH
- Burkhard Spill
- G02 - OPTICS
Information Patent Application
Apparatus and method for inspecting a semiconductor component
- Publication number 20050219521
- Publication date Oct 6, 2005
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR MEASURING FEATURE WIDTHS ON MASKS FOR THE SEMICONDUCT...
- Publication number 20050084770
- Publication date Apr 21, 2005
- Leica Microsystems Semiconductor GmbH
- Wolfgang Vollrath
- G02 - OPTICS

Wolfgang Vollrath

Person

Patents Grantslast 30 patents

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Apparatus for the optical inspection of wafers

Device and method for evaluating defects in the edge area of a wafe...

Apparatus for measuring feature widths on masks for the semiconduct...

Apparatus and method for inspecting a semiconductor component

Illumination device for a DUV microscope and DUV microscope

Patents Applicationslast 30 patents

IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING

Apparatus for the Optical Inspection of Wafers

DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION...

Dark Field Objective for a Microscope

Device and method for scanning the whole surface of a wafer

DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFE...

Apparatus for wafer inspection

Apparatus for wafer inspection

Method for Selecting a Wavelength, and a Microscope

Apparatus and method for inspecting a semiconductor component

APPARATUS FOR MEASURING FEATURE WIDTHS ON MASKS FOR THE SEMICONDUCT...