Wouter Anthon SOER

Person

Nijmegen, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Spectral purity filter
- Patent number 9,726,989
- Issue date Aug 8, 2017
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source module of an EUV lithographic apparatus, lithographic appara...
- Patent number 9,465,306
- Issue date Oct 11, 2016
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Spectral purity filter, lithographic apparatus, and method for manu...
- Patent number 9,195,152
- Issue date Nov 24, 2015
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Spectral purity filter, radiation source, lithographic apparatus, a...
- Patent number 9,195,144
- Issue date Nov 24, 2015
- ASML Netherlands B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectral purity filters for use in a lithographic apparatus
- Patent number 9,041,912
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Zone plate
- Patent number 8,836,917
- Issue date Sep 16, 2014
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Grant
Spectral purity filter, lithographic apparatus, and method for manu...
- Patent number 8,817,237
- Issue date Aug 26, 2014
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Grant
Radiation source with cleaning apparatus
- Patent number 8,742,381
- Issue date Jun 3, 2014
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Grant
Spectral purity filter and lithographic apparatus
- Patent number 8,665,420
- Issue date Mar 4, 2014
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus, plasma source, and reflecting method
- Patent number 8,593,617
- Issue date Nov 26, 2013
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
- Patent number 8,416,391
- Issue date Apr 9, 2013
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for removing a deposition on an uncapped multilayer mirror o...
- Patent number 8,405,051
- Issue date Mar 26, 2013
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Grant
Spectral purity filters for use in a lithographic apparatus
- Patent number 8,390,788
- Issue date Mar 5, 2013
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element, lithographic apparatus including such an optical e...
- Patent number 8,345,223
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical element, lithographic apparatus including such an optical e...
- Patent number 8,289,499
- Issue date Oct 16, 2012
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source
- Patent number 8,263,950
- Issue date Sep 11, 2012
- ASML Netherlands B.V.
- Wouter Anthon Soer
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source and lithographic apparatus including a contaminati...
- Patent number 8,242,471
- Issue date Aug 14, 2012
- ASML Netherlands B.V.
- Wouter Anthon Soer
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Debris prevention system and lithographic apparatus
- Patent number 8,227,771
- Issue date Jul 24, 2012
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus
- Patent number 8,120,752
- Issue date Feb 21, 2012
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Grant
Debris mitigation system and lithographic apparatus
- Patent number 8,071,963
- Issue date Dec 6, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source and lithographic apparatus
- Patent number 7,952,084
- Issue date May 31, 2011
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 7,928,412
- Issue date Apr 19, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system and lithographic apparatus comprising the same
- Patent number 7,863,591
- Issue date Jan 4, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G01 - MEASURING TESTING
Information Patent Grant
Assembly comprising a radiation source, a reflector and a contamina...
- Patent number 7,839,482
- Issue date Nov 23, 2010
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device, method of providing a patterning device, photoli...
- Patent number 7,771,896
- Issue date Aug 10, 2010
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Self-shading electrodes for debris suppression in an EUV source
- Patent number 7,759,663
- Issue date Jul 20, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Debris mitigation system and lithographic apparatus
- Patent number 7,737,418
- Issue date Jun 15, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device arranged to measure a quantity relating to radiation and lit...
- Patent number 7,724,349
- Issue date May 25, 2010
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system and lithographic apparatus
- Patent number 7,696,492
- Issue date Apr 13, 2010
- ASML Netherlands B.V.
- Arnoud Cornelis Wassink
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Debris prevention system, radiation system, and lithographic apparatus
- Patent number 7,687,788
- Issue date Mar 30, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
RADIATION SOURCE WITH CLEANING APPARATUS
- Publication number 20130161542
- Publication date Jun 27, 2013
- ASML, Netherlands B.V.
- Vadim Yevgenyevich BANINE
- B08 - CLEANING
Information Patent Application
Components for EUV Lithographic Apparatus, EUV Lithographic Apparat...
- Publication number 20130114059
- Publication date May 9, 2013
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan Jak
- B32 - LAYERED PRODUCTS
Information Patent Application
SPECTRAL PURITY FILTER
- Publication number 20130038926
- Publication date Feb 14, 2013
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
Spectral Purity Filters for Use in a Lithographic Apparatus
- Publication number 20130010363
- Publication date Jan 10, 2013
- ASML NETHERLANDS B.V.
- Wouter Anthon Soer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER
- Publication number 20130010275
- Publication date Jan 10, 2013
- ASML NETHERLANDS B.V.
- Viacheslav Medvedev
- B82 - NANO-TECHNOLOGY
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACT...
- Publication number 20120182537
- Publication date Jul 19, 2012
- ASML NETHERLANDS B.V.
- Andrei Mikhailovich Yakunin
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...
- Publication number 20120154779
- Publication date Jun 21, 2012
- ASML NETHERLANDS B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...
- Publication number 20120154778
- Publication date Jun 21, 2012
- Koninklijke Philips Electronics N.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...
- Publication number 20120147351
- Publication date Jun 14, 2012
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ZONE PLATE
- Publication number 20120105961
- Publication date May 3, 2012
- ASML NETHERLANDS B.V.
- Wouter Anthon SOER
- G02 - OPTICS
Information Patent Application
CONTACT DETECTION TUBES, METHODS AND SYSTEMS FOR MEDICAL PROCEDURES
- Publication number 20110257671
- Publication date Oct 20, 2011
- Koninklijke Philips Electronics N.V.
- Karen Irene Trovato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Spectral Purity Filter, Radiation Source, Lithographic Apparatus, a...
- Publication number 20110211185
- Publication date Sep 1, 2011
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...
- Publication number 20110164237
- Publication date Jul 7, 2011
- ASML NETHERLANDS B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPE...
- Publication number 20110157573
- Publication date Jun 30, 2011
- ASML NETHERLANDS B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTER AND LITHOGRAPHIC APPARATUS
- Publication number 20110149262
- Publication date Jun 23, 2011
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20110134405
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation Source
- Publication number 20110128519
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Wouter Anthon SOÉR
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR REMOVING A DEPOSITION ON AN UNCAPPED MULTILAYER MIRROR O...
- Publication number 20110117504
- Publication date May 19, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- B08 - CLEANING
Information Patent Application
CATHETER WITH SEPARABLE SECTIONS
- Publication number 20110092956
- Publication date Apr 21, 2011
- Koninklijke Philips Electronics N.V.
- Wouter Anthon Soer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20110044425
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan Jak
- G02 - OPTICS
Information Patent Application
SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20110043782
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...
- Publication number 20110019174
- Publication date Jan 27, 2011
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
DEVICE CONSTRUCTED AND ARRANGED TO GENERATE RADIATION, LITHOGRAPHIC...
- Publication number 20110007289
- Publication date Jan 13, 2011
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS, PLASMA SOURCE, AND REFLECTING METHOD
- Publication number 20110007292
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus VAN HERPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...
- Publication number 20100328639
- Publication date Dec 30, 2010
- ASML NETHERLANDS B.V.
- Martin Jacobus Johan Jak
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD
- Publication number 20100271610
- Publication date Oct 28, 2010
- ASML NETHERLANDS B.V.
- Wouter Anthon SOER
- G02 - OPTICS
Information Patent Application
SPECTRAL FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL F...
- Publication number 20100259744
- Publication date Oct 14, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G02 - OPTICS
Information Patent Application
SELF-SHADING ELECTRODES FOR DEBRIS SUPPRESSION IN AN EUV SOURCE
- Publication number 20100181502
- Publication date Jul 22, 2010
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20100141909
- Publication date Jun 10, 2010
- ASML NETHERLANDS B.V.
- Arnoud Cornelis Wassink
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20100039632
- Publication date Feb 18, 2010
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus VAN HERPEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Wouter Anthon SOER

Person

Patents Grantslast 30 patents

Spectral purity filter

Source module of an EUV lithographic apparatus, lithographic appara...

Spectral purity filter, lithographic apparatus, and method for manu...

Spectral purity filter, radiation source, lithographic apparatus, a...

Spectral purity filters for use in a lithographic apparatus

Zone plate

Spectral purity filter, lithographic apparatus, and method for manu...

Radiation source with cleaning apparatus

Spectral purity filter and lithographic apparatus

Lithographic apparatus, plasma source, and reflecting method

Radiation source, lithographic apparatus and device manufacturing m...

Method for removing a deposition on an uncapped multilayer mirror o...

Spectral purity filters for use in a lithographic apparatus

Optical element, lithographic apparatus including such an optical e...

Optical element, lithographic apparatus including such an optical e...

Radiation source

Radiation source and lithographic apparatus including a contaminati...

Debris prevention system and lithographic apparatus

Lithographic apparatus

Debris mitigation system and lithographic apparatus

Radiation source and lithographic apparatus

Lithographic apparatus, and device manufacturing method

Radiation system and lithographic apparatus comprising the same

Assembly comprising a radiation source, a reflector and a contamina...

Patterning device, method of providing a patterning device, photoli...

Self-shading electrodes for debris suppression in an EUV source

Debris mitigation system and lithographic apparatus

Device arranged to measure a quantity relating to radiation and lit...

Radiation system and lithographic apparatus

Debris prevention system, radiation system, and lithographic apparatus

Patents Applicationslast 30 patents

RADIATION SOURCE WITH CLEANING APPARATUS

Components for EUV Lithographic Apparatus, EUV Lithographic Apparat...

SPECTRAL PURITY FILTER

Spectral Purity Filters for Use in a Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACT...

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...

ZONE PLATE

CONTACT DETECTION TUBES, METHODS AND SYSTEMS FOR MEDICAL PROCEDURES

Spectral Purity Filter, Radiation Source, Lithographic Apparatus, a...

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPE...

SPECTRAL PURITY FILTER AND LITHOGRAPHIC APPARATUS

RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...

Radiation Source

METHOD FOR REMOVING A DEPOSITION ON AN UNCAPPED MULTILAYER MIRROR O...

CATHETER WITH SEPARABLE SECTIONS

SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS

SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS

OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...

DEVICE CONSTRUCTED AND ARRANGED TO GENERATE RADIATION, LITHOGRAPHIC...

LITHOGRAPHIC APPARATUS, PLASMA SOURCE, AND REFLECTING METHOD

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANU...

LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD

SPECTRAL FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL F...

SELF-SHADING ELECTRODES FOR DEBRIS SUPPRESSION IN AN EUV SOURCE

RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS

RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...