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Xing Chen
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Optical interleaving with enhanced spectral response and reduced po...
Patent number
6,907,167
Issue date
Jun 14, 2005
Gazillion Bits, Inc.
Hwan J. Jeong
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Focused beam spectroscopic ellipsometry method and system
Patent number
6,734,967
Issue date
May 11, 2004
KLA-Tencor Technologies Corporation
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Grant
System for non-destructive measurement of samples
Patent number
6,268,916
Issue date
Jul 31, 2001
KLA-Tencor Corporation
Shing Lee
G01 - MEASURING TESTING
Information
Patent Grant
Focused beam spectroscopic ellipsometry method and system
Patent number
5,910,842
Issue date
Jun 8, 1999
KLA-Tencor Corporation
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Grant
Film measurement system with improved calibration
Patent number
5,771,094
Issue date
Jun 23, 1998
KLA-Tencor Corporation
Joseph Carter
G01 - MEASURING TESTING
Information
Patent Grant
Focused beam spectroscopic ellipsometry method and system
Patent number
5,608,526
Issue date
Mar 4, 1997
Tencor Instruments
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for calibrating an ellipsometer
Patent number
5,581,350
Issue date
Dec 3, 1996
Tencor Instruments
Xing Chen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Focused beam spectroscopic ellipsometry method and system
Publication number
20050105090
Publication date
May 19, 2005
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Application
Focused beam spectroscopic ellipsometry method and system
Publication number
20040100632
Publication date
May 27, 2004
Timothy R. Piwonka-Corle
G01 - MEASURING TESTING
Information
Patent Application
Optical interleaving with enhanced spectral response and reduced po...
Publication number
20020126354
Publication date
Sep 12, 2002
Gazillion Bits, Inc.
Hwan J. Jeong
G02 - OPTICS