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Lexington, MA, US
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last 30 patents
Information
Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
Patent number
12,075,554
Issue date
Aug 27, 2024
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge protection on semiconductor substrates
Patent number
11,830,824
Issue date
Nov 28, 2023
Applied Materials, Inc.
Amirhasan Nourbakhsh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
Patent number
11,733,224
Issue date
Aug 22, 2023
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Grant
Graded doping in power devices
Patent number
11,705,490
Issue date
Jul 18, 2023
Applied Materials, Inc.
Ashish Pal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for passivating a target
Patent number
11,661,651
Issue date
May 30, 2023
Applied Materials, Inc.
Chao Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for passivating a target
Patent number
11,512,387
Issue date
Nov 29, 2022
Applied Materials, Inc.
Chao Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
Patent number
11,262,340
Issue date
Mar 1, 2022
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
Patent number
11,019,715
Issue date
May 25, 2021
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,940,635
Issue date
Mar 9, 2021
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Toroidal plasma channel with varying cross-section areas along the...
Patent number
10,930,474
Issue date
Feb 23, 2021
MKS Instruments, Inc.
Chaolin Hu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,071,521
Issue date
Sep 11, 2018
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,991,098
Issue date
Jun 5, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact, configurable power supply for energizing ozone-producing c...
Patent number
9,865,426
Issue date
Jan 9, 2018
MKS Instruments, Inc.
Ken Tran
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Microwave plasma applicator with improved power uniformity
Patent number
9,653,266
Issue date
May 16, 2017
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,630,142
Issue date
Apr 25, 2017
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact, configurable power supply for energizing ozone-producing c...
Patent number
9,302,912
Issue date
Apr 5, 2016
MKS Instruments, Inc.
Ken Tran
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Toroidal plasma chamber for high gas flow rate process
Patent number
9,275,839
Issue date
Mar 1, 2016
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduction of copper or trace metal contaminants in plasma electroly...
Patent number
8,888,982
Issue date
Nov 18, 2014
MKS Instruments Inc.
Xing Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for processing metal bearing gases
Patent number
8,779,322
Issue date
Jul 15, 2014
MKS Instruments Inc.
William M. Holber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for shoot-through protection
Patent number
8,749,939
Issue date
Jun 10, 2014
MKS Instruments, Inc.
Ken Tran
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Chemical ionization reaction or proton transfer reaction mass spect...
Patent number
8,704,171
Issue date
Apr 22, 2014
MKS Instruments, Inc.
Timothy Roger Robinson
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus of providing power to ignite and sustain a pla...
Patent number
8,692,466
Issue date
Apr 8, 2014
MKS Instruments Inc.
Souheil Benzerrouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Versatile zero-voltage switch resonant inverter for industrial diel...
Patent number
8,680,777
Issue date
Mar 25, 2014
MKS Instruments, Inc.
Ken Tran
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for processing metal bearing gases
Patent number
8,658,936
Issue date
Feb 25, 2014
MKS Instruments Inc.
William M. Holber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical ionization reaction or proton transfer reaction mass spect...
Patent number
8,334,505
Issue date
Dec 18, 2012
MKS Instruments, Inc.
Timothy Roger Robinson
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for processing metal bearing gases
Patent number
8,124,906
Issue date
Feb 28, 2012
MKS Instruments, Inc.
William M. Holber
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Applicators and cooling systems for a plasma device
Patent number
8,053,700
Issue date
Nov 8, 2011
MKS Instruments, Inc.
Jack J. Schuss
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical ionization reaction or proton transfer reaction mass spect...
Patent number
8,003,935
Issue date
Aug 23, 2011
MKS Instruments, Inc.
Timothy Roger Robinson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical ionization reaction or proton transfer reaction mass spect...
Patent number
8,003,936
Issue date
Aug 23, 2011
MKS Instruments, Inc.
Timothy Roger Robinson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively-coupled plasma source
Patent number
7,969,096
Issue date
Jun 28, 2011
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
Publication number
20220307126
Publication date
Sep 29, 2022
Applied Materials, Inc.
Chao DU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220310364
Publication date
Sep 29, 2022
Applied Materials, Inc.
Halbert CHONG
B08 - CLEANING
Information
Patent Application
EDGE PROTECTION ON SEMICONDUCTOR SUBSTRATES
Publication number
20220310531
Publication date
Sep 29, 2022
Applied Materials, Inc.
Amirhasan Nourbakhsh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220310363
Publication date
Sep 29, 2022
Applied Materials, Inc.
Halbert CHONG
B08 - CLEANING
Information
Patent Application
GRADED DOPING IN POWER DEVICES
Publication number
20220254886
Publication date
Aug 11, 2022
Applied Materials, Inc.
Ashish Pal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
Publication number
20220214321
Publication date
Jul 7, 2022
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
Publication number
20210317568
Publication date
Oct 14, 2021
Applied Materials, Inc.
Chao DU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20210319989
Publication date
Oct 14, 2021
Applied Materials, Inc.
Halbert CHONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
Publication number
20210243876
Publication date
Aug 5, 2021
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
Publication number
20200022246
Publication date
Jan 16, 2020
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
Publication number
20190170715
Publication date
Jun 6, 2019
MKS Instruments
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20180345569
Publication date
Dec 6, 2018
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20180233333
Publication date
Aug 16, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
Publication number
20170309456
Publication date
Oct 26, 2017
MKS Instruments, Inc.
Chaolin Hu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20170213704
Publication date
Jul 27, 2017
MKS Instruments, Inc.
Xing Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20170173846
Publication date
Jun 22, 2017
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING C...
Publication number
20160181063
Publication date
Jun 23, 2016
MKS Instruments, Inc.
Ken Tran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
Publication number
20150318148
Publication date
Nov 5, 2015
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
Publication number
20150287575
Publication date
Oct 8, 2015
MKS Instruments, Inc.
Chaolin Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
Publication number
20150279626
Publication date
Oct 1, 2015
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Toroidal plasma Abatement Apparatus and Method
Publication number
20140262746
Publication date
Sep 18, 2014
MKS Instruments, Inc.
Xing Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and Apparatus for a Large Area Inductive Plasma Source
Publication number
20140062285
Publication date
Mar 6, 2014
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERSATILE ZERO-VOLTAGE SWITCH RESONANT INVERTER FOR INDUSTRIAL DIEL...
Publication number
20130257311
Publication date
Oct 3, 2013
MKS Instruments, Inc.
KEN TRAN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING C...
Publication number
20130257301
Publication date
Oct 3, 2013
MKS Instruments, Inc.
Ken Tran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spect...
Publication number
20130203180
Publication date
Aug 8, 2013
MKS Instruments, Inc.
Timothy Roger Robinson
G01 - MEASURING TESTING
Information
Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
Publication number
20130146225
Publication date
Jun 13, 2013
MKS Instruments, Inc.
Xing Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Toroidal Plasma Channel with Varying Cross-Section Areas Along the...
Publication number
20130118589
Publication date
May 16, 2013
MKS Instruments, Inc.
Chaolin Hu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR SHOOT-THROUGH PROTECTION
Publication number
20120287545
Publication date
Nov 15, 2012
MKS Instruments, Inc.
Ken Tran
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
Method and Apparatus for Processing Metal Bearing Gases
Publication number
20120160059
Publication date
Jun 28, 2012
MKS Instruments, Inc.
William M. Holber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spect...
Publication number
20120003748
Publication date
Jan 5, 2012
MKS Instruments, Inc.
Timothy Roger Robinson
G01 - MEASURING TESTING