Xingfei MAO

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor reaction chamber and atomic layer plasma etching appa...
- Patent number 12,191,114
- Issue date Jan 7, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingfei Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber
- Patent number 12,080,524
- Issue date Sep 3, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift thimble system, reaction chamber, and semiconductor processing...
- Patent number 11,694,880
- Issue date Jul 4, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Xingfei Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode mechanism and reaction chamber
- Patent number 11,410,833
- Issue date Aug 9, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yahui Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20240266150
- Publication date Aug 8, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yan LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE
- Publication number 20230402265
- Publication date Dec 14, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER DEVICE AND SEMICONDUCTOR REACTION CHAMBER
- Publication number 20230274917
- Publication date Aug 31, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jinji XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR REACTION CHAMBER
- Publication number 20230230803
- Publication date Jul 20, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xingfei MAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE MECHANISM, CURRENT CONTROL METHOD FOR RADIO FREQUEN...
- Publication number 20230197407
- Publication date Jun 22, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR REACTION CHAMBER AND ATOMIC LAYER PLASMA ETCHING APPA...
- Publication number 20230187173
- Publication date Jun 15, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xingfei MAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT THIMBLE SYSTEM, REACTION CHAMBER, AND SEMICONDUCTOR PROCESSING...
- Publication number 20210313157
- Publication date Oct 7, 2021
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Xingfei MAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE MECHANISM AND REACTION CHAMBER
- Publication number 20200321198
- Publication date Oct 8, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yahui HUANG
- H01 - BASIC ELECTRIC ELEMENTS

Xingfei MAO

Person

Patents Grantslast 30 patents

Semiconductor reaction chamber and atomic layer plasma etching appa...

Semiconductor processing chamber

Lift thimble system, reaction chamber, and semiconductor processing...

Lower electrode mechanism and reaction chamber

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING CHAMBER

PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE

CARRIER DEVICE AND SEMICONDUCTOR REACTION CHAMBER

SEMICONDUCTOR REACTION CHAMBER

UPPER ELECTRODE MECHANISM, CURRENT CONTROL METHOD FOR RADIO FREQUEN...

SEMICONDUCTOR REACTION CHAMBER AND ATOMIC LAYER PLASMA ETCHING APPA...

LIFT THIMBLE SYSTEM, REACTION CHAMBER, AND SEMICONDUCTOR PROCESSING...

LOWER ELECTRODE MECHANISM AND REACTION CHAMBER