Xinhui Niu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Approximating eigensolutions for use in determining the profile of...
- Patent number 7,630,873
- Issue date Dec 8, 2009
- Tokyo Electron Limited
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Generation of a library of periodic grating diffraction signals
- Patent number 7,593,119
- Issue date Sep 22, 2009
- Tokyo Electron Limited
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology of single features
- Patent number 7,586,623
- Issue date Sep 8, 2009
- Tokyo Electron Limited
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Generation and use of integrated circuit profile-based simulation i...
- Patent number 7,580,823
- Issue date Aug 25, 2009
- Tokyo Electron Limited
- Nickhil Jakatdar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model and parameter selection for optical metrology
- Patent number 7,505,153
- Issue date Mar 17, 2009
- Timbre Technologies, Inc.
- Vi Vuong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Generic interface for an optical metrology system
- Patent number 7,450,232
- Issue date Nov 11, 2008
- Timbre Technologies, Inc.
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Grant
Generating simulated diffraction signals for two-dimensional struct...
- Patent number 7,427,521
- Issue date Sep 23, 2008
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Azimuthal scanning of a structure formed on a semiconductor wafer
- Patent number 7,414,733
- Issue date Aug 19, 2008
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology of single features
- Patent number 7,379,192
- Issue date May 27, 2008
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Model and parameter selection for optical metrology
- Patent number 7,330,279
- Issue date Feb 12, 2008
- Timbre Technologies, Inc.
- Vi Vuong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Generation of a library of periodic grating diffraction signals
- Patent number 7,277,189
- Issue date Oct 2, 2007
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Generic interface for an optical metrology system
- Patent number 7,271,902
- Issue date Sep 18, 2007
- Timbre Technologies, Inc.
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Grant
Azimuthal scanning of a structure formed on a semiconductor wafer
- Patent number 7,224,471
- Issue date May 29, 2007
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Generation and use of integrated circuit profile-based simulation i...
- Patent number 7,136,796
- Issue date Nov 14, 2006
- Timbre Technologies, Inc.
- Nickhil Jakatdar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model optimization for structures with additional materials
- Patent number 7,072,049
- Issue date Jul 4, 2006
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Generic interface for an optical metrology system
- Patent number 7,064,829
- Issue date Jun 20, 2006
- Timbre Technologies, Inc.
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Grant
Balancing planarization of layers and the effect of underlying stru...
- Patent number 7,041,515
- Issue date May 9, 2006
- Timbre Technologies, Inc.
- Nickhil Jakatdar
- G01 - MEASURING TESTING
Information Patent Grant
Generating a library of simulated-diffraction signals and hypotheti...
- Patent number 7,031,894
- Issue date Apr 18, 2006
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology of single features
- Patent number 7,030,999
- Issue date Apr 18, 2006
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Grant
Method and system of dynamic learning through a regression-based li...
- Patent number 6,961,679
- Issue date Nov 1, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Caching of intra-layer calculations for rapid rigorous coupled-wave...
- Patent number 6,952,271
- Issue date Oct 4, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Overlay measurements using zero-order cross polarization measurements
- Patent number 6,947,141
- Issue date Sep 20, 2005
- Timbre Technologies, Inc.
- Joerg Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Generation of a library of periodic grating diffraction signals
- Patent number 6,943,900
- Issue date Sep 13, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for dynamic learning through a regression-based l...
- Patent number 6,928,395
- Issue date Aug 9, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Caching of intra-layer calculations for rapid rigorous coupled-wave...
- Patent number 6,891,626
- Issue date May 10, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
Grating test patterns and methods for overlay metrology
- Patent number 6,855,464
- Issue date Feb 15, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G02 - OPTICS
Information Patent Grant
Optical profilometry of additional-material deviations in a periodi...
- Patent number 6,839,145
- Issue date Jan 4, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Grant
System and method for efficient simulation of reflectometry respons...
- Patent number 6,833,914
- Issue date Dec 21, 2004
- Timbre Technologies, Inc.
- Junwei Bao
- G01 - MEASURING TESTING
Information Patent Grant
Overlay measurements using zero-order cross polarization measurements
- Patent number 6,804,005
- Issue date Oct 12, 2004
- Timbre Technologies, Inc.
- Joerg Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system of dynamic learning through a regression-based li...
- Patent number 6,785,638
- Issue date Aug 31, 2004
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METROLOGY OF SINGLE FEATURES
- Publication number 20080259357
- Publication date Oct 23, 2008
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
- Publication number 20080249754
- Publication date Oct 9, 2008
- Timbre Technologies, Inc.
- Xinhui Niu
- G02 - OPTICS
Information Patent Application
MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
- Publication number 20080151269
- Publication date Jun 26, 2008
- Timbre Technologies, Inc.
- Vi Vuong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM
- Publication number 20080037017
- Publication date Feb 14, 2008
- TOKYO ELECTRON LIMITED
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Application
Azimuthal scanning of a structure formed on a semiconductor wafer
- Publication number 20070236705
- Publication date Oct 11, 2007
- TIMBRE TECHNOLOGIES INC.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Generation and use of integrated circuit profile-based simulation i...
- Publication number 20070118349
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Nickhil Jakatdar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Generic interface for an optical metrology system
- Publication number 20060244966
- Publication date Nov 2, 2006
- TOKYO ELECTRON LIMITED
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Application
Optical metrology of single features
- Publication number 20060187468
- Publication date Aug 24, 2006
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Shape roughness measurement in optical metrology
- Publication number 20050275850
- Publication date Dec 15, 2005
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Generation of a library of periodic grating diffraction signals
- Publication number 20050256687
- Publication date Nov 17, 2005
- Timbre Technologies, Inc.
- Xinhui Niu
- G02 - OPTICS
Information Patent Application
Azimuthal scanning of a structure formed on a semiconductor wafer
- Publication number 20050088665
- Publication date Apr 28, 2005
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Caching of intra-layer calculations for rapid rigorous coupled-wave...
- Publication number 20050068545
- Publication date Mar 31, 2005
- Xinhui Niu
- G02 - OPTICS
Information Patent Application
Overlay measurements using zero-order cross polarization measurements
- Publication number 20050030536
- Publication date Feb 10, 2005
- Timbre Technologies, Inc.
- Joerg Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system of dynamic learning through a regression-based li...
- Publication number 20040225477
- Publication date Nov 11, 2004
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Application
Method and system of dynamic learning through a regression-based li...
- Publication number 20040220760
- Publication date Nov 4, 2004
- Timbre Technologies, Inc.
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Application
Optical metrology of single features
- Publication number 20040212812
- Publication date Oct 28, 2004
- Timbre Technologies, Inc.
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Generic interface for an optical metrology system
- Publication number 20040184035
- Publication date Sep 23, 2004
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Application
Approximating eigensolutions for use in determining the profile of...
- Publication number 20040167754
- Publication date Aug 26, 2004
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Model optimization for structures with additional materials
- Publication number 20040150838
- Publication date Aug 5, 2004
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Application
Balancing planarization of layers and the effect of underlying stru...
- Publication number 20040147048
- Publication date Jul 29, 2004
- Timbre Technologies, Inc.
- Nickhil Jakatdar
- G01 - MEASURING TESTING
Information Patent Application
Grating test patterns and methods for overlay metrology
- Publication number 20040137341
- Publication date Jul 15, 2004
- Xinhui Niu
- G02 - OPTICS
Information Patent Application
Generating simulated diffraction signals for two-dimensional struct...
- Publication number 20040078173
- Publication date Apr 22, 2004
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Model and parameter selection for optical metrology
- Publication number 20040017574
- Publication date Jan 29, 2004
- Vi Vuong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical metrology of single features
- Publication number 20030232454
- Publication date Dec 18, 2003
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Overlay measurements using periodic gratings
- Publication number 20030212525
- Publication date Nov 13, 2003
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Overlay measurements using zero-order cross polarization measurements
- Publication number 20030206298
- Publication date Nov 6, 2003
- Joerg Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical profilometry of additional-material deviations in a periodi...
- Publication number 20030204325
- Publication date Oct 30, 2003
- Xinhui Niu
- G02 - OPTICS
Information Patent Application
COMBINED OPTICAL PROFILOMETRY AND PROJECTION MICROSCOPY OF INTEGRAT...
- Publication number 20030203590
- Publication date Oct 30, 2003
- Wenge Yang
- G01 - MEASURING TESTING
Information Patent Application
Generating a library of simulated-diffraction signals and hypotheti...
- Publication number 20030200063
- Publication date Oct 23, 2003
- Xinhui Niu
- G01 - MEASURING TESTING
Information Patent Application
Balancing planarization of layers and the effect of underlying stru...
- Publication number 20030194820
- Publication date Oct 16, 2003
- Nickhil Jakatdar
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Approximating eigensolutions for use in determining the profile of...

Generation of a library of periodic grating diffraction signals

Optical metrology of single features

Generation and use of integrated circuit profile-based simulation i...

Model and parameter selection for optical metrology

Generic interface for an optical metrology system

Generating simulated diffraction signals for two-dimensional struct...

Azimuthal scanning of a structure formed on a semiconductor wafer

Optical metrology of single features

Model and parameter selection for optical metrology

Generation of a library of periodic grating diffraction signals

Generic interface for an optical metrology system

Azimuthal scanning of a structure formed on a semiconductor wafer

Generation and use of integrated circuit profile-based simulation i...

Model optimization for structures with additional materials

Generic interface for an optical metrology system

Balancing planarization of layers and the effect of underlying stru...

Generating a library of simulated-diffraction signals and hypotheti...

Optical metrology of single features

Method and system of dynamic learning through a regression-based li...

Caching of intra-layer calculations for rapid rigorous coupled-wave...

Overlay measurements using zero-order cross polarization measurements

Generation of a library of periodic grating diffraction signals

Method and system for dynamic learning through a regression-based l...

Caching of intra-layer calculations for rapid rigorous coupled-wave...

Grating test patterns and methods for overlay metrology

Optical profilometry of additional-material deviations in a periodi...

System and method for efficient simulation of reflectometry respons...

Overlay measurements using zero-order cross polarization measurements

Method and system of dynamic learning through a regression-based li...

Patents Applicationslast 30 patents

OPTICAL METROLOGY OF SINGLE FEATURES

GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS

MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY

GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM

Azimuthal scanning of a structure formed on a semiconductor wafer

Generation and use of integrated circuit profile-based simulation i...

Generic interface for an optical metrology system

Optical metrology of single features

Shape roughness measurement in optical metrology

Generation of a library of periodic grating diffraction signals

Azimuthal scanning of a structure formed on a semiconductor wafer

Caching of intra-layer calculations for rapid rigorous coupled-wave...

Overlay measurements using zero-order cross polarization measurements

Method and system of dynamic learning through a regression-based li...

Method and system of dynamic learning through a regression-based li...

Optical metrology of single features

Generic interface for an optical metrology system

Approximating eigensolutions for use in determining the profile of...

Model optimization for structures with additional materials

Balancing planarization of layers and the effect of underlying stru...

Grating test patterns and methods for overlay metrology

Generating simulated diffraction signals for two-dimensional struct...

Model and parameter selection for optical metrology

Optical metrology of single features

Overlay measurements using periodic gratings

Overlay measurements using zero-order cross polarization measurements

Optical profilometry of additional-material deviations in a periodi...

COMBINED OPTICAL PROFILOMETRY AND PROJECTION MICROSCOPY OF INTEGRAT...

Generating a library of simulated-diffraction signals and hypotheti...

Balancing planarization of layers and the effect of underlying stru...