Xinjian Lei

Person

Vista, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High temperature atomic layer deposition of silicon-containing film
- Patent number 12,297,115
- Issue date May 13, 2025
- VERSUM MATERIALS US, LLC
- Meiliang Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Compositions comprising silacycloalkanes and methods using same for...
- Patent number 12,264,258
- Issue date Apr 1, 2025
- VERSUM MATERIALS US, LLC
- Raymond N. Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 12,230,496
- Issue date Feb 18, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,049,695
- Issue date Jul 30, 2024
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 12,018,040
- Issue date Jun 25, 2024
- VERSUM MATERIALS US, LLC
- Matthew R. Macdonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized linear and cyclic oligosiloxanes for dep...
- Patent number 11,952,465
- Issue date Apr 9, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...
- Patent number 11,884,689
- Issue date Jan 30, 2024
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon-containing films
- Patent number 11,851,756
- Issue date Dec 26, 2023
- VERSUM MATERIALS US, LLC
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and methods using same for carbon doped silicon contain...
- Patent number 11,742,200
- Issue date Aug 29, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 11,732,351
- Issue date Aug 22, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and processes for depositing carbon-doped silicon-cont...
- Patent number 11,725,111
- Issue date Aug 15, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stable alkenyl or alkynyl-containing organosilicon precursor compos...
- Patent number 11,713,328
- Issue date Aug 1, 2023
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Trisilylamine derivatives as precursors for high growth rate silico...
- Patent number 11,702,743
- Issue date Jul 18, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of carbon doped silicon oxide
- Patent number 11,649,547
- Issue date May 16, 2023
- VERSUM MATERIALS US, LLC
- Meiliang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,631,580
- Issue date Apr 18, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for making silicon containing films
- Patent number 11,626,279
- Issue date Apr 11, 2023
- VERSUM MATERIALS US, LLC
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron-containing compounds, compositions, and methods for the depos...
- Patent number 11,605,535
- Issue date Mar 14, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-polysiloxanes for deposition of silicon-containing films
- Patent number 11,591,692
- Issue date Feb 28, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for the deposition of silicon oxide films
- Patent number 11,584,854
- Issue date Feb 21, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
- Patent number 11,270,880
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,268,190
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,193,206
- Issue date Dec 7, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon compounds and methods for depositing films using same
- Patent number 11,158,498
- Issue date Oct 26, 2021
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for carbon doped silicon contai...
- Patent number 11,152,206
- Issue date Oct 19, 2021
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bisaminoalkoxysilane compounds and methods for using same to deposi...
- Patent number 11,142,658
- Issue date Oct 12, 2021
- VERSUM MATERIALS US, LLC
- Daniel P. Spence
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Organoaminosilane precursors and methods for depositing films compr...
- Patent number 11,139,162
- Issue date Oct 5, 2021
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 11,104,990
- Issue date Aug 31, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 11,098,069
- Issue date Aug 24, 2021
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...
- Publication number 20250146131
- Publication date May 8, 2025
- VERSUM MATERIALS US, LLC
- STEVEN GERARD MAYORGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...
- Publication number 20250101586
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYERED SILICON NITRIDE FILM
- Publication number 20250011924
- Publication date Jan 9, 2025
- VERSUM MATERIALS US, LLC
- SE-WON LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20250010331
- Publication date Jan 9, 2025
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20240304438
- Publication date Sep 12, 2024
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...
- Publication number 20240287257
- Publication date Aug 29, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
New Precursors For Depositing Films With High Elastic Modulus
- Publication number 20240240309
- Publication date Jul 18, 2024
- VERSUM MATERIALS US, LLC
- WILLIAM ROBERT ENTLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20240191346
- Publication date Jun 13, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...
- Publication number 20240182499
- Publication date Jun 6, 2024
- VERSUM MATERIALS US, LLC
- ROBERT GORDON RIDGEWAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON DIELECTRIC FILM
- Publication number 20240170283
- Publication date May 23, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION FOR ATOMIC LAYER DEPOSITION OF HIGH QUALITY SILICON OXI...
- Publication number 20240158915
- Publication date May 16, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS
- Publication number 20240093366
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- MING LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...
- Publication number 20240093360
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...
- Publication number 20240052490
- Publication date Feb 15, 2024
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE THERMAL ATOMIC LAYER DEPOSITION
- Publication number 20240047196
- Publication date Feb 8, 2024
- VERSUM MATERIALS US, LLC
- RONALD M. PEARLSTEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PLASMA ENHANCED ATOMIC LAYER DEPOSITION
- Publication number 20240014036
- Publication date Jan 11, 2024
- VERSUM MATERIALS US, LLC
- RONALD M. PEARLSTEIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF SILICON AND OXYGEN CONTAINING DIELECTRIC FI...
- Publication number 20230416911
- Publication date Dec 28, 2023
- VERSUM MATERIALS US, LLC
- RAVINDRA KANJOLIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20230386825
- Publication date Nov 30, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20230377874
- Publication date Nov 23, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...
- Publication number 20230348736
- Publication date Nov 2, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C07 - ORGANIC CHEMISTRY
Information Patent Application
STABLE ALKENYL OR ALKYNYL-CONTAINING ORGANOSILICON PRECURSOR COMPOS...
- Publication number 20230339986
- Publication date Oct 26, 2023
- VERSUM MATERIALS US, LLC
- ROBERT G. RIDGEWAY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR SILICON CONTAINING FILMS
- Publication number 20230183272
- Publication date Jun 15, 2023
- VERSUM MATERIALS US, LLC
- XINJIAN LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
- Publication number 20230167549
- Publication date Jun 1, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Compounds And Methods For Depositing Films Using Same
- Publication number 20230123377
- Publication date Apr 20, 2023
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS
- Publication number 20230103933
- Publication date Apr 6, 2023
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR DEPOSITING A FILM
- Publication number 20230058258
- Publication date Feb 23, 2023
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR NON-CONFORMAL DEPOSITION OF...
- Publication number 20220333241
- Publication date Oct 20, 2022
- VERSUM MATERIALS US, LLC
- MEILIANG WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEW GROUP V AND VI TRANSITION METAL PRECURSORS FOR THIN FILM DEPOSI...
- Publication number 20220315612
- Publication date Oct 6, 2022
- VERSUM MATERIALS US, LLC
- GUOCAN LI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
- Publication number 20220301862
- Publication date Sep 22, 2022
- VERSUM MATERIALS US, LLC
- MANCHAO XIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Xinjian Lei

Person

Patents Grantslast 30 patents

High temperature atomic layer deposition of silicon-containing film

Compositions comprising silacycloalkanes and methods using same for...

Organoaminosilane precursors and methods for depositing films compr...

Methods for depositing a conformal metal or metalloid silicon nitri...

Compositions and methods using same for deposition of silicon-conta...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Organoamino-functionalized linear and cyclic oligosiloxanes for dep...

Processes for depositing silicon-containing films using halidosilan...

Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...

Methods for depositing silicon-containing films

Composition and methods using same for carbon doped silicon contain...

Methods for depositing a conformal metal or metalloid silicon nitri...

Compositions and processes for depositing carbon-doped silicon-cont...

Stable alkenyl or alkynyl-containing organosilicon precursor compos...

Trisilylamine derivatives as precursors for high growth rate silico...

Deposition of carbon doped silicon oxide

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Compositions and methods for making silicon containing films

Boron-containing compounds, compositions, and methods for the depos...

Organoamino-polysiloxanes for deposition of silicon-containing films

Compositions and methods for the deposition of silicon oxide films

Precursors and flowable CVD methods for making low-k films to fill...

Processes for depositing silicon-containing films using halidosilan...

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Silicon compounds and methods for depositing films using same

Compositions and methods using same for carbon doped silicon contai...

Bisaminoalkoxysilane compounds and methods for using same to deposi...

Organoaminosilane precursors and methods for depositing films compr...

Methods for depositing a conformal metal or metalloid silicon nitri...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Patents Applicationslast 30 patents

COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...

HALIDE-FUNCTIONALIZED CYCLOTRISILAZANES AS PRECURSORS FOR DEPOSITIO...

MULTILAYERED SILICON NITRIDE FILM

ALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

Organoamino-Functionalized Linear and Cyclic Oligosiloxanes for Dep...

New Precursors For Depositing Films With High Elastic Modulus

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...

SELECTIVE DEPOSITION OF SILICON DIELECTRIC FILM

COMPOSITION FOR ATOMIC LAYER DEPOSITION OF HIGH QUALITY SILICON OXI...

COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS

COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...

MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...

SELECTIVE THERMAL ATOMIC LAYER DEPOSITION

SELECTIVE PLASMA ENHANCED ATOMIC LAYER DEPOSITION

SELECTIVE DEPOSITION OF SILICON AND OXYGEN CONTAINING DIELECTRIC FI...

ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

COMPOSITIONS AND PROCESSES FOR DEPOSITING CARBON-DOPED SILICON-CONT...

STABLE ALKENYL OR ALKYNYL-CONTAINING ORGANOSILICON PRECURSOR COMPOS...

COMPOSITIONS AND METHODS USING SAME FOR SILICON CONTAINING FILMS

ORGANOAMINO-POLISILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS

Silicon Compounds And Methods For Depositing Films Using Same

NEW PRECURSORS FOR DEPOSITING FILMS WITH ELASTIC MODULUS

METHOD FOR DEPOSITING A FILM

COMPOSITIONS AND METHODS USING SAME FOR NON-CONFORMAL DEPOSITION OF...

NEW GROUP V AND VI TRANSITION METAL PRECURSORS FOR THIN FILM DEPOSI...

MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM