Xinyi Chen

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Tualatin, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Nanodevice arrays for electrical energy storage, capture and manage...
- Patent number 10,032,569
- Issue date Jul 24, 2018
- University of Maryland, College Park
- Gary W. Rubloff
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High selectivity and low stress carbon hardmask by pulsed low frequ...
- Patent number 9,589,799
- Issue date Mar 7, 2017
- Lam Research Corporation
- Sirish K. Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
- Publication number 20240030028
- Publication date Jan 25, 2024
- LAM RESEARCH CORPORATION
- Abbin Antony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LIFT PIN MECHANISM FOR PREVENTING LOCAL BACKSIDE DEPOSITION
- Publication number 20230099332
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- Andrew H. Breninger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...
- Publication number 20220333239
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ashish SAURABH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANODEVICE ARRAYS FOR ELECTRICAL ENERGY STORAGE, CAPTURE AND MANAGE...
- Publication number 20150200058
- Publication date Jul 16, 2015
- University of Maryland
- Gary W. RUBLOFF
- B82 - NANO-TECHNOLOGY
Information Patent Application
HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQU...
- Publication number 20150093908
- Publication date Apr 2, 2015
- LAM RESEARCH CORPORATION
- Sirish K. Reddy
- H01 - BASIC ELECTRIC ELEMENTS