Xu-Jin Wang

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Patents Grantslast 30 patents

Information Patent Grant
Carriers and polishing apparatus
- Patent number 6,273,803
- Issue date Aug 14, 2001
- SpeedFam Co., Ltd.
- Xu-Jin Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,210,260
- Issue date Apr 3, 2001
- SpeedFam Co., Ltd.
- Hideo Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry circulation type surface polishing machine
- Patent number 6,159,082
- Issue date Dec 12, 2000
- Misuo Sugiyama
- B24 - GRINDING POLISHING
Information Patent Grant
Surface polishing pad
- Patent number 6,089,966
- Issue date Jul 18, 2000
- Hatsuyuki Arai
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier and CMP apparatus
- Patent number 6,012,964
- Issue date Jan 11, 2000
- Speedfam Co., Ltd.
- Hatsuyuki Arai
- B24 - GRINDING POLISHING