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Suzhou, CN
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last 30 patents
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Patent Grant
Cleaning apparatus and method for quartz tube
Patent number
12,121,943
Issue date
Oct 22, 2024
ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.
Bin Hua
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
CLEANING APPARATUS AND METHOD FOR QUARTZ TUBE
Publication number
20240216964
Publication date
Jul 4, 2024
ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO.,LTD.
Bin HUA
F26 - DRYING