Yahru CHENG

Person

Taipei, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,222,643
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,159,787
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 12,135,501
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hui Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Humidity control or aqueous treatment for EUV metallic resist
- Patent number 12,106,961
- Issue date Oct 1, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air spacer formation with a spin-on dielectric material
- Patent number 12,094,952
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ambient controlled two-step thermal treatment for spin-on coating l...
- Patent number 12,087,592
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Fong Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist layer surface treatment, cap layer, and method of formi...
- Patent number 12,057,315
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing undesired light influence in extreme ultraviolet...
- Patent number 12,013,641
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist layer outgassing prevention
- Patent number 12,002,675
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Yu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist developer and method of developing photoresist
- Patent number 11,971,657
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices and pattern formation...
- Patent number 11,942,322
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- An-Ren Zi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ambient controlled two-step thermal treatment for spin-on coating l...
- Patent number 11,901,189
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Fong Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 11,822,237
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hui Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 11,784,046
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jia-Lin Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist layer surface treatment, cap layer, and method of formi...
- Patent number 11,705,332
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing undesired light influence in extreme ultraviolet...
- Patent number 11,703,762
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Air spacer formation with a spin-on dielectric material
- Patent number 11,626,482
- Issue date Apr 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ting-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device and a coating material
- Patent number 11,276,568
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ling Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist composition and method of forming photoresist pattern
- Patent number 11,029,602
- Issue date Jun 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- An-Ren Zi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming semiconductor structure
- Patent number 11,003,082
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device
- Patent number 10,770,293
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chung Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist solvents for photolithography applications
- Patent number 10,768,527
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chung Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device and a coating material
- Patent number 10,529,552
- Issue date Jan 7, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ling Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20240387173
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240385514
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
- Publication number 20240387188
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fong Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL
- Publication number 20240363722
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ting CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...
- Publication number 20240355623
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gate Patterning for Stacked Device Structure
- Publication number 20240321640
- Publication date Sep 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Szu-Hua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...
- Publication number 20240295820
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST LAYER OUTGASSING PREVENTION
- Publication number 20240282577
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Yu CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST
- Publication number 20240264526
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren ZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST MATERIALS AND ASSOCIATED METHODS
- Publication number 20230384669
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION...
- Publication number 20230386840
- Publication date Nov 30, 2023
- TAIWAN SEMICONDUCTOR MANUFACTRING COMPANY, LTD.
- An-Ren ZI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
- Publication number 20230386852
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fong Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230375920
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DIRECTED SELF-ASSEMBLY WITH HIGH BOILING POIN...
- Publication number 20230377883
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Ling CHANG CHIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230369048
- Publication date Nov 16, 2023
- Jia-Lin WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...
- Publication number 20230326754
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manfacturing Company, Ltd.
- Yi-Chen KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL
- Publication number 20230242115
- Publication date Aug 3, 2023
- Taiwan Semiconductor For Manufactuing Co., Ltd.
- Ting-Ting CHEN
- B60 - VEHICLES IN GENERAL
Information Patent Application
MANUFACTURING METHOD OF EUV PHOTO MASKS
- Publication number 20230161240
- Publication date May 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Che HSIEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOSENSITIVE MATERIAL FOR PHOTORESIST AND LITHOGRAPHY
- Publication number 20230087992
- Publication date Mar 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Che Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20230072538
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HUMIDITY CONTROL OR AQUEOUS TREATMENT FOR EUV METALLIC RESIST
- Publication number 20230012705
- Publication date Jan 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- An-Ren ZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...
- Publication number 20220373890
- Publication date Nov 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST MATERIALS AND ASSOCIATED METHODS
- Publication number 20220365428
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL
- Publication number 20220285492
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Ting CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST LAYER OUTGASSING PREVENTION
- Publication number 20220028684
- Publication date Jan 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Yu CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20220005687
- Publication date Jan 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION...
- Publication number 20210366711
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- An-Ren ZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20210305047
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Lin WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20210302839
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Cheng LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...
- Publication number 20210305040
- Publication date Sep 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Chen KUO
- H01 - BASIC ELECTRIC ELEMENTS

Yahru CHENG

Person

Patents Grantslast 30 patents

Method of manufacturing a semiconductor device and pattern formatio...

Method of manufacturing a semiconductor device and pattern formatio...

Method of manufacturing a semiconductor device

Humidity control or aqueous treatment for EUV metallic resist

Air spacer formation with a spin-on dielectric material

Ambient controlled two-step thermal treatment for spin-on coating l...

Photoresist layer surface treatment, cap layer, and method of formi...

Method of reducing undesired light influence in extreme ultraviolet...

Photoresist layer outgassing prevention

Photoresist developer and method of developing photoresist

Method of manufacturing semiconductor devices and pattern formation...

Ambient controlled two-step thermal treatment for spin-on coating l...

Method of manufacturing a semiconductor device

Method of manufacturing a semiconductor device

Photoresist layer surface treatment, cap layer, and method of formi...

Method of reducing undesired light influence in extreme ultraviolet...

Air spacer formation with a spin-on dielectric material

Method for manufacturing a semiconductor device and a coating material

Photoresist composition and method of forming photoresist pattern

Method for forming semiconductor structure

Method for manufacturing a semiconductor device

Resist solvents for photolithography applications

Method for manufacturing a semiconductor device and a coating material

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...

AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL

PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...

Gate Patterning for Stacked Device Structure

METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...

PHOTORESIST LAYER OUTGASSING PREVENTION

PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST

PHOTORESIST MATERIALS AND ASSOCIATED METHODS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION...

AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SYSTEM AND METHOD FOR DIRECTED SELF-ASSEMBLY WITH HIGH BOILING POIN...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...

AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL

MANUFACTURING METHOD OF EUV PHOTO MASKS

PHOTOSENSITIVE MATERIAL FOR PHOTORESIST AND LITHOGRAPHY

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

HUMIDITY CONTROL OR AQUEOUS TREATMENT FOR EUV METALLIC RESIST

METHOD OF REDUCING UNDESIRED LIGHT INFLUENCE IN EXTREME ULTRAVIOLET...

PHOTORESIST MATERIALS AND ASSOCIATED METHODS

AIR SPACER FORMATION WITH A SPIN-ON DIELECTRIC MATERIAL

PHOTORESIST LAYER OUTGASSING PREVENTION

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...