Yan Guan

Follow

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for depositing extremely low resistivity tungsten
- Patent number 9,589,808
- Issue date Mar 7, 2017
- Lam Research Corporation
- Hanna Bamnolker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing tungsten film with low roughness and low resi...
- Patent number 8,853,080
- Issue date Oct 7, 2014
- Novellus Systems, Inc.
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DEPOSITING EXTREMELY LOW RESISTIVITY TUNGSTEN
- Publication number 20170133231
- Publication date May 11, 2017
- LAM RESEARCH CORPORATION
- Hanna Bamnolker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING EXTREMELY LOW RESISTIVITY TUNGSTEN
- Publication number 20150179461
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Hanna Bamnolker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL BOTTOM CLEAN FOR IMPROVED FLUORINE UTILIZATION AND INTEGRA...
- Publication number 20150030766
- Publication date Jan 29, 2015
- Novellus Systems, Inc.
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBERS
- Publication number 20140069459
- Publication date Mar 13, 2014
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING TUNGSTEN FILM WITH LOW ROUGHNESS AND LOW RESI...
- Publication number 20140073135
- Publication date Mar 13, 2014
- Yan Guan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...