Yang-Shan HUANG

Person

Veldhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid handling system, method and lithographic apparatus
- Patent number 12,032,296
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and a method for positioning a substage or a sta...
- Patent number 11,460,786
- Issue date Oct 4, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Object stage bearing for lithographic apparatus
- Patent number 11,442,369
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pick-and-place tool having multiple pick up elements
- Patent number 11,232,960
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle suppression systems and methods
- Patent number 11,204,558
- Issue date Dec 21, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle traps and barriers for particle suppression
- Patent number 11,175,596
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Particle suppression systems and methods
- Patent number 11,137,694
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detecting substrate surface variations
- Patent number 11,092,902
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Johannes Franciscus Martinus D'Achard Van Enschut
- G01 - MEASURING TESTING
Information Patent Grant
Positioning system and lithographic apparatus
- Patent number 11,003,095
- Issue date May 11, 2021
- ASML Netherlands B.V.
- Krijn Frederik Bustraan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,705,438
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 10,571,814
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Andre Bernardus Jeunink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus comprising an actuator, and method for prote...
- Patent number 9,921,494
- Issue date Mar 20, 2018
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,811,005
- Issue date Nov 7, 2017
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and a lithographic apparatus
- Patent number 9,389,518
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- Antonius Franciscus Johannes De Groot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of deforming a substrate table and d...
- Patent number 9,329,501
- Issue date May 3, 2016
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,261,798
- Issue date Feb 16, 2016
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,141,004
- Issue date Sep 22, 2015
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus comprising a substrate table and a surface s...
- Patent number 9,110,387
- Issue date Aug 18, 2015
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electromagnetic actuator, stage apparatus and lithographic apparatus
- Patent number 8,687,171
- Issue date Apr 1, 2014
- ASML Netherlands B.V.
- Sven Antoin Johan Hol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20230107989
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...
- Publication number 20230063156
- Publication date Mar 2, 2023
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20220397830
- Publication date Dec 15, 2022
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS
- Publication number 20210391139
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A Positioning System and a Method for Positioning a Substage or a S...
- Publication number 20210373446
- Publication date Dec 2, 2021
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
- Publication number 20210173315
- Publication date Jun 10, 2021
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Object Stage Bearing for Lithographic Apparatus
- Publication number 20200333717
- Publication date Oct 22, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Particle Traps and Barriers for Particle Suppression
- Publication number 20200225591
- Publication date Jul 16, 2020
- ASML Netherlands B,V.
- Han-Kwang NIENHUYS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
A CLEAR-OUT TOOL, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURI...
- Publication number 20200183288
- Publication date Jun 11, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
- Publication number 20200142326
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Detecting Substrate Surface Variations
- Publication number 20200124977
- Publication date Apr 23, 2020
- ASML Netherlands B.V.
- Johannes Franciscus Martinus D'ACHARD VAN ENSCHUT
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200117097
- Publication date Apr 16, 2020
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20190235392
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Andre Bernardus JEUNINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20190219932
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Krijn Frederik BUSTRAAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE MINIATURE PICK UP ELEMENTS FOR A COMPONENT STACKING AND/OR...
- Publication number 20190148189
- Publication date May 16, 2019
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE,...
- Publication number 20170010544
- Publication date Jan 12, 2017
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20160154322
- Publication date Jun 2, 2016
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS COMPRISING AN ACTUATOR, AND METHOD FOR PROTE...
- Publication number 20150070678
- Publication date Mar 12, 2015
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20130314684
- Publication date Nov 28, 2013
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage System and a Lithographic Apparatus
- Publication number 20130162968
- Publication date Jun 27, 2013
- ASML NETHERLANDS B.V.
- Antonius Franciscus Johannes DE GROOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND SUBSTRATE HANDLING METHOD
- Publication number 20130107241
- Publication date May 2, 2013
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis LAFARRE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Substrate Handling Method
- Publication number 20130077078
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis LAFARRE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF DEFORMING A SUBSTRATE TABLE AND D...
- Publication number 20120327386
- Publication date Dec 27, 2012
- ASML NETHERLANDS B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS COMPRISING A SUBSTRATE TABLE
- Publication number 20120300188
- Publication date Nov 29, 2012
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20120249987
- Publication date Oct 4, 2012
- ASML NETHERLANDS B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
- Publication number 20120212723
- Publication date Aug 23, 2012
- ASML NETHERLANDS B.V.
- Sven Antoin Johan Hol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yang-Shan HUANG

Person

Patents Grantslast 30 patents

Fluid handling system, method and lithographic apparatus

Replaceable module for a charged particle apparatus

Positioning system and a method for positioning a substage or a sta...

Object stage bearing for lithographic apparatus

Pick-and-place tool having multiple pick up elements

Particle suppression systems and methods

Particle traps and barriers for particle suppression

Particle suppression systems and methods

Method and apparatus for detecting substrate surface variations

Positioning system and lithographic apparatus

Lithographic method

Lithographic method

Lithographic apparatus comprising an actuator, and method for prote...

Lithographic apparatus and device manufacturing method

Stage system and a lithographic apparatus

Lithographic apparatus, method of deforming a substrate table and d...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus comprising a substrate table and a surface s...

Electromagnetic actuator, stage apparatus and lithographic apparatus

Patents Applicationslast 30 patents

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS

A Positioning System and a Method for Positioning a Substage or a S...

PARTICLE SUPPRESSION SYSTEMS AND METHODS

Object Stage Bearing for Lithographic Apparatus

Particle Traps and Barriers for Particle Suppression

A CLEAR-OUT TOOL, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURI...

PARTICLE SUPPRESSION SYSTEMS AND METHODS

Method and Apparatus for Detecting Substrate Surface Variations

LITHOGRAPHIC METHOD

LITHOGRAPHIC METHOD

POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS

MULTIPLE MINIATURE PICK UP ELEMENTS FOR A COMPONENT STACKING AND/OR...

COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE,...

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS COMPRISING AN ACTUATOR, AND METHOD FOR PROTE...

Lithographic Apparatus and Device Manufacturing Method

Stage System and a Lithographic Apparatus

LITHOGRAPHIC APPARATUS AND SUBSTRATE HANDLING METHOD

Lithographic Apparatus and Substrate Handling Method

LITHOGRAPHIC APPARATUS, METHOD OF DEFORMING A SUBSTRATE TABLE AND D...

LITHOGRAPHIC APPARATUS COMPRISING A SUBSTRATE TABLE

LITHOGRAPHIC APPARATUS AND METHOD

ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS