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Yannick Feurprier
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East Greenbush, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Trench and hole patterning with EUV resists using dual frequency ca...
Patent number
9,818,610
Issue date
Nov 14, 2017
Tokyo Electron Limited
Hiroie Matsumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self aligned via in integrated circuit
Patent number
9,768,113
Issue date
Sep 19, 2017
International Business Machines Corporation
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench and hole patterning with EUV resists using dual frequency ca...
Patent number
9,607,834
Issue date
Mar 28, 2017
Tokyo Electron Limited
Hiroie Matsumoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self aligned via in integrated circuit
Patent number
9,385,078
Issue date
Jul 5, 2016
International Business Machines Corporation
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self aligned via in integrated circuit
Patent number
9,373,582
Issue date
Jun 21, 2016
International Business Machines Corporation
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method for metallization pattern profiling
Patent number
8,809,185
Issue date
Aug 19, 2014
Tokyo Electron Limited
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to remove capping layer of insulation dielectric in intercon...
Patent number
8,202,803
Issue date
Jun 19, 2012
Tokyo Electron Limited
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for metallizing a pattern in a dielectric film
Patent number
8,080,473
Issue date
Dec 20, 2011
Tokyo Electron Limited
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching low-k material using an oxide hard mask
Patent number
7,947,609
Issue date
May 24, 2011
Tokyo Electron Limited
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a damascene structure
Patent number
7,935,640
Issue date
May 3, 2011
Tokyo Electron Limited
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for selective removal of damaged multi-stack bilayer films
Patent number
7,723,237
Issue date
May 25, 2010
Tokyo Electron Limited
Sandra Hyland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low damage method for ashing a substrate using CO2/CO-based process
Patent number
7,637,269
Issue date
Dec 29, 2009
Tokyo Electron Limited
Kelvin Zin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TRENCH AND HOLE PATTERNING WITH EUV RESISTS USING DUAL FREQUENCY CA...
Publication number
20170263443
Publication date
Sep 14, 2017
TOKYO ELECTRON LIMITED
Hiroie Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED VIA IN INTEGRATED CIRCUIT
Publication number
20160379929
Publication date
Dec 29, 2016
International Business Machines Corporation
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH AND HOLE PATTERNING WITH EUV RESISTS USING DUAL FREQUENCY CA...
Publication number
20160293405
Publication date
Oct 6, 2016
TOKYO ELECTRON LIMITED
Hiroie Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT VIA STRUCTURE AND METHOD OF FABRICATION
Publication number
20150076707
Publication date
Mar 19, 2015
STMicroelectronics, Inc.
Yann Mignot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to remove capping layer of insulation dielectric in intercon...
Publication number
20110143542
Publication date
Jun 16, 2011
TOKYO ELECTRON LIMITED
Yannick FEURPRIER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for metallizing a pattern in a dielectric film
Publication number
20090061634
Publication date
Mar 5, 2009
TOKYO ELECTRON LIMITED
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for forming a damascene structure
Publication number
20090039518
Publication date
Feb 12, 2009
TOKYO ELECTRON LIMITED
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for etching low-k material using an oxide hard mask
Publication number
20090042398
Publication date
Feb 12, 2009
TOKYO ELECTRON LIMITED
Yannick Feurprier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SELECTIVE REMOVAL OF DAMAGED MULTI-STACK BILAYER FILMS
Publication number
20080142988
Publication date
Jun 19, 2008
TOKYO ELECTRON LIMITED
Sandra Hyland
H01 - BASIC ELECTRIC ELEMENTS