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Ion implantation method and device
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Patent number 11,862,429
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Issue date Jan 2, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Yi-Hsiung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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Implanter calibration
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Patent number 11,264,204
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Issue date Mar 1, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd
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Yi-Hsiung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation method
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Patent number 11,164,722
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Issue date Nov 2, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd
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Yi-Hsiung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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Implanter calibration
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Patent number 10,818,473
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Issue date Oct 27, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd
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Yi-Hsiung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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