Yao-Hwan Kao

Person

Baoshan Shiang, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for manufacturing a semiconductor device
- Patent number 12,019,370
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Han Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin dispenser module substrate surface protection system
- Patent number 11,806,743
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company
- Ching-Hai Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Spin dispenser module substrate surface protection system
- Patent number 11,344,910
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Hai Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Spin dispenser module substrate surface protection system
- Patent number 9,855,579
- Issue date Jan 2, 2018
- Taiwan Semiconductor Manufacturing Company
- Ching-Hai Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing apparatus and method of operating the same
- Patent number 9,793,143
- Issue date Oct 17, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Hai Yang
- B08 - CLEANING
Information Patent Grant
Semiconductor apparatus and adjustment method
- Patent number 9,589,820
- Issue date Mar 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Hwan Kao
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Baking apparatus and method
- Patent number 9,536,759
- Issue date Jan 3, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Hai Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for replacing resist filter to reduce resist filt...
- Patent number 9,375,665
- Issue date Jun 28, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of optimizing lithography tools utilization
- Patent number 9,081,306
- Issue date Jul 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for replacing resist filter to reduce resist filt...
- Patent number 8,580,117
- Issue date Nov 12, 2013
- Taiwan Semiconductor Manufactuing Company, Ltd.
- Yao-Hwan Kao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
PEB embedded exposure apparatus
- Patent number 7,789,576
- Issue date Sep 7, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Feng-Ning Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable exhaust flow for thermal uniformity
- Patent number 7,026,580
- Issue date Apr 11, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Hwan Kao
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Distribution manifold for exhausting photoresist vapors
- Patent number 6,927,363
- Issue date Aug 9, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Hwan Kao
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Spin-coater with self-cleaning cup and method of using
- Patent number 6,723,168
- Issue date Apr 20, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yao-Hwan Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlled multi-nozzle liquid dispensing system
- Patent number 5,857,590
- Issue date Jan 12, 1999
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230369060
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Hai YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230062148
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Han HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPIN DISPENSER MODULE SUBSTRATE SURFACE PROTECTION SYSTEM
- Publication number 20220288627
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Hai Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER BACKSIDE CLEANING APPARATUS AND METHOD OF CLEANING WAFER BACK...
- Publication number 20200171623
- Publication date Jun 4, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Hai Yang
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor Manufacturing Apparatus and Method Thereof
- Publication number 20200033723
- Publication date Jan 30, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Hai Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spin Dispenser Module Substrate Surface Protection System
- Publication number 20180117621
- Publication date May 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Hai Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR APPARATUS AND ADJUSTMENT METHOD
- Publication number 20160351420
- Publication date Dec 1, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Yao-Hwan KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BAKING APPARATUS AND METHOD
- Publication number 20160351423
- Publication date Dec 1, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Hai YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Spin Dispenser Module Substrate Surface Protection System
- Publication number 20150224532
- Publication date Aug 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Hai Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20150194325
- Publication date Jul 9, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Hai YANG
- B08 - CLEANING
Information Patent Application
METHOD OF OPTIMIZING LITHOGRAPHY TOOLS UTILIZATION
- Publication number 20140078478
- Publication date Mar 20, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR REPLACING RESIST FILTER TO REDUCE RESIST FILT...
- Publication number 20140054212
- Publication date Feb 27, 2014
- Yao-Hwan Kao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PEB EMBEDDED EXPOSURE APPARATUS
- Publication number 20080241760
- Publication date Oct 2, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Feng-Ning Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Replacing Resist Filter to Reduce Resist Filt...
- Publication number 20080230492
- Publication date Sep 25, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Hwan Kao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Adjustable rinse flow in semiconductor processing
- Publication number 20050229976
- Publication date Oct 20, 2005
- Yao-Hwan Kao
- G05 - CONTROLLING REGULATING
Information Patent Application
Rinse nozzle and method
- Publication number 20050211267
- Publication date Sep 29, 2005
- Yao-Hwan Kao
- B08 - CLEANING
Information Patent Application
Adjustable exhaust flow for thermal uniformity
- Publication number 20050211695
- Publication date Sep 29, 2005
- Yao-Hwan Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Developer dispensing apparatus with adjustable knife ring
- Publication number 20050051196
- Publication date Mar 10, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.,
- Yao-Hwan Kao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist supply apparatus with resist recycling function, coating sys...
- Publication number 20050048208
- Publication date Mar 3, 2005
- Yao-Hwan Kao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developer dispensing nozzle with movable shutter plates
- Publication number 20040188547
- Publication date Sep 30, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Hwan Kao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spin-coater with self-cleaning cup and method of using
- Publication number 20020197400
- Publication date Dec 26, 2002
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yao-Hwan Kao
- H01 - BASIC ELECTRIC ELEMENTS

Yao-Hwan Kao

Person

Patents Grantslast 30 patents

Method and system for manufacturing a semiconductor device

Spin dispenser module substrate surface protection system

Spin dispenser module substrate surface protection system

Spin dispenser module substrate surface protection system

Semiconductor processing apparatus and method of operating the same

Semiconductor apparatus and adjustment method

Baking apparatus and method

System and method for replacing resist filter to reduce resist filt...

Method of optimizing lithography tools utilization

System and method for replacing resist filter to reduce resist filt...

PEB embedded exposure apparatus

Adjustable exhaust flow for thermal uniformity

Distribution manifold for exhausting photoresist vapors

Spin-coater with self-cleaning cup and method of using

Controlled multi-nozzle liquid dispensing system

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE

METHOD AND SYSTEM FOR MANUFACTURING A SEMICONDUCTOR DEVICE

SPIN DISPENSER MODULE SUBSTRATE SURFACE PROTECTION SYSTEM

WAFER BACKSIDE CLEANING APPARATUS AND METHOD OF CLEANING WAFER BACK...

Semiconductor Manufacturing Apparatus and Method Thereof

Spin Dispenser Module Substrate Surface Protection System

SEMICONDUCTOR APPARATUS AND ADJUSTMENT METHOD

BAKING APPARATUS AND METHOD

Spin Dispenser Module Substrate Surface Protection System

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME

METHOD OF OPTIMIZING LITHOGRAPHY TOOLS UTILIZATION

SYSTEM AND METHOD FOR REPLACING RESIST FILTER TO REDUCE RESIST FILT...

PEB EMBEDDED EXPOSURE APPARATUS

System and Method for Replacing Resist Filter to Reduce Resist Filt...

Adjustable rinse flow in semiconductor processing

Rinse nozzle and method

Adjustable exhaust flow for thermal uniformity

Developer dispensing apparatus with adjustable knife ring

Resist supply apparatus with resist recycling function, coating sys...

Developer dispensing nozzle with movable shutter plates

Spin-coater with self-cleaning cup and method of using