Yao-Wen Guo

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Pingtung County, TW

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Patents Grantslast 30 patents

Information Patent Grant
Lithography scanner throughput
- Patent number 9,529,275
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for improving immersion scanner overlay performance
- Patent number 8,199,314
- Issue date Jun 12, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chung Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for improving immersion scanner overlay performance
- Patent number 8,068,208
- Issue date Nov 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chung Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for forming semiconductor structures
- Patent number 7,787,977
- Issue date Aug 31, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Hsun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving critical dimension uniformity
- Patent number 7,571,021
- Issue date Aug 4, 2009
- Taiwan Semiconductor Manufacturing Company
- Chun-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR IMPROVING IMMERSION SCANNER OVERLAY PERFORMANCE
- Publication number 20120045192
- Publication date Feb 23, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Cheng PENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Scanner Throughput
- Publication number 20080198351
- Publication date Aug 21, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsun Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and System for Improving Critical Dimension Uniformity
- Publication number 20080195243
- Publication date Aug 14, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method For Improving Immersion Scanner Overlay Performance
- Publication number 20080129969
- Publication date Jun 5, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Chung Peng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR FORMING SEMICONDUCTOR STRUCTURES
- Publication number 20080125902
- Publication date May 29, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Chien-Hsun Lin
- H01 - BASIC ELECTRIC ELEMENTS