Yasuhiro Fukumoto

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus and substrate treating system includin...
- Patent number 11,387,121
- Issue date Jul 12, 2022
- SCREEN Holdings Co., Ltd.
- Tatsuhisa Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 11,143,964
- Issue date Oct 12, 2021
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 11,107,698
- Issue date Aug 31, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method an...
- Patent number 10,955,745
- Issue date Mar 23, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 10,941,492
- Issue date Mar 9, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 10,915,025
- Issue date Feb 9, 2021
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 10,900,126
- Issue date Jan 26, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 10,651,062
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 10,629,463
- Issue date Apr 21, 2020
- SCREEN Holdings Co., Ltd.
- Toru Momma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device substrate processing apparatus, exposure method of...
- Patent number 10,444,636
- Issue date Oct 15, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method of...
- Patent number 10,401,736
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate treating apparatus and treatment gas supplying nozzle
- Patent number 10,214,814
- Issue date Feb 26, 2019
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support structure, heat treatment apparatus using same, f...
- Patent number 7,927,096
- Issue date Apr 19, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Fukumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Thermal processing apparatus, thermal processing method, and substr...
- Patent number 7,522,823
- Issue date Apr 21, 2009
- Sokudo Co., Ltd.
- Yasuhiro Fukumoto
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing unit, method for detecting the position of a s...
- Patent number 7,139,638
- Issue date Nov 21, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20210134605
- Publication date May 6, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20200272055
- Publication date Aug 27, 2020
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM
- Publication number 20190273005
- Publication date Sep 5, 2019
- SCREEN Holdings Co., Ltd.
- Tatsuhisa TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...
- Publication number 20190086808
- Publication date Mar 21, 2019
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20180269084
- Publication date Sep 20, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253012
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253011
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180230598
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180230599
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180231895
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180231894
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD
- Publication number 20180033660
- Publication date Feb 1, 2018
- SCREEN Holdings Co., Ltd.
- Toru MOMMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND TREATMENT GAS SUPPLYING NOZZLE
- Publication number 20160281235
- Publication date Sep 29, 2016
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARATUS USING SAME, F...
- Publication number 20070222131
- Publication date Sep 27, 2007
- Yasuhiro Fukumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate processing unit, method for detecting the position of a s...
- Publication number 20050065634
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus, thermal processing method, and substr...
- Publication number 20050058440
- Publication date Mar 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Fukumoto
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiro Fukumoto

Person

Patents Grantslast 30 patents

Substrate treating apparatus and substrate treating system includin...

Substrate treating method and apparatus used therefor

Substrate treating method

Exposure device, substrate processing apparatus, exposure method an...

Substrate treating method

Substrate treating method

Substrate treating method and apparatus used therefor

Substrate treating apparatus

Thermal processing apparatus and thermal processing method

Exposure device substrate processing apparatus, exposure method of...

Exposure device, substrate processing apparatus, exposure method of...

Substrate treating apparatus and treatment gas supplying nozzle

Substrate support structure, heat treatment apparatus using same, f...

Thermal processing apparatus, thermal processing method, and substr...

Substrate processing unit, method for detecting the position of a s...

Patents Applicationslast 30 patents

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...

SUBSTRATE TREATING APPARATUS

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING METHOD

SUBSTRATE TREATING METHOD

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD

SUBSTRATE TREATING APPARATUS AND TREATMENT GAS SUPPLYING NOZZLE

SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARATUS USING SAME, F...

Substrate processing unit, method for detecting the position of a s...

Thermal processing apparatus, thermal processing method, and substr...