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Yasuo Koike
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Kashima-shi, JP
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last 30 patents
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Patent Grant
Silicon single crystal, silicon wafer, and epitaxial wafer.
Patent number
6,641,888
Issue date
Nov 4, 2003
Sumitomo Mitsubishi Silicon Corporation
Eiichi Asayama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of manufacturing silicon epitaxial wafer
Patent number
6,599,816
Issue date
Jul 29, 2003
Sumitomo Metal Industries, Ltd.
Kouji Sueoka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for manufacturing semiconductor silicon epitaxial wafer and...
Patent number
6,277,193
Issue date
Aug 21, 2001
Sumitomo Metal Industries, Ltd.
Shinsuke Sadamitsu
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Silicon single crystal, silicon wafer, and epitaxial wafer
Publication number
20020142171
Publication date
Oct 3, 2002
SUMITOMO METAL INDUSTRIES, LTD.
Eiichi Asayama
C30 - CRYSTAL GROWTH
Information
Patent Application
Silicon single crystal, silicon wafer, and epitaxial wafer
Publication number
20020142170
Publication date
Oct 3, 2002
SUMITOMO METAL INDUSTRIES, LTD.
Eiichi Asayama
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of manufacturing silicon epitaxial wafer
Publication number
20010021574
Publication date
Sep 13, 2001
Sumitomo Metal Industries, Ltd.
Kouji Sueoka
C30 - CRYSTAL GROWTH