Yasushi Takeuchi

Person

Kanagawa-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Support structure for suspended injector and substrate processing a...
- Patent number 10,549,305
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Yuya Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus, method of depositing film, and non-trans...
- Patent number 10,428,425
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Katsuhiko Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic annealing apparatus
- Patent number 10,297,481
- Issue date May 21, 2019
- Tokyo Electron Limited
- Yuji Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for managing atmosphere in storage container
- Patent number 10,096,504
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer, spacer transferring method, processing method and processin...
- Patent number 9,679,794
- Issue date Jun 13, 2017
- Tokyo Electron Limited
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic annealing apparatus
- Patent number 9,508,914
- Issue date Nov 29, 2016
- Tokyo Electron Limited
- Yuji Ono
- C21 - METALLURGY OF IRON
Information Patent Grant
Cover opening/closing apparatus, thermal processing apparatus using...
- Patent number 9,406,537
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveying method, recording medium in which program is re...
- Patent number 9,368,384
- Issue date Jun 14, 2016
- Tokyo Electron Limited
- Daisuke Yamagishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transport apparatus, substrate transport method, and reco...
- Patent number 9,136,152
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Katsuhiko Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 9,064,916
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Activated gas injector, film deposition apparatus, and film deposit...
- Patent number 9,053,909
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate conveying container opening/closing device, lid opening/c...
- Patent number 9,048,273
- Issue date Jun 2, 2015
- Tokyo Electron Limited
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition apparatus
- Patent number 8,951,347
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 8,741,064
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Film deposition apparatus
- Patent number 8,721,790
- Issue date May 13, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment method and heat treatment apparatus wherein the subs...
- Patent number 8,230,806
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Vertical heat treatment apparatus and method for operating the same
- Patent number 8,177,550
- Issue date May 15, 2012
- Tokyo Electron Limited
- Kenjiro Haraki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method wherein the substrate holder is composed of t...
- Patent number 7,900,579
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Grant
Processing system for object to be processed
- Patent number 6,729,823
- Issue date May 4, 2004
- Tokyo Electron Limited
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240295027
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068101
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Yasushi TAKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240060181
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230257877
- Publication date Aug 17, 2023
- TOKYO ELECTRON LIMITED
- Ibuki HAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230062671
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Support Structure for Suspended Injector and Substrate Processing A...
- Publication number 20180056317
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Yuya SASAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND COMPUTER READ...
- Publication number 20170241018
- Publication date Aug 24, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, METHOD OF DEPOSITING FILM, AND NON-TRANS...
- Publication number 20170211181
- Publication date Jul 27, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANAGING ATMOSPHERE IN STORAGE CONTAINER
- Publication number 20140305540
- Publication date Oct 16, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ANNEALING APPARATUS
- Publication number 20140284321
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Yuji Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ANNEALING APPARATUS
- Publication number 20140287926
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Yuji Ono
- C21 - METALLURGY OF IRON
Information Patent Application
SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20140251209
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20140220503
- Publication date Aug 7, 2014
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20140213068
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORTNG APPARATUS AND PROCESSING APPARATUS
- Publication number 20140086712
- Publication date Mar 27, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACER, SPACER TRANSFERRING METHOD, PROCESSING METHOD AND PROCESSIN...
- Publication number 20140079526
- Publication date Mar 20, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER OPENING/CLOSING APPARATUS, THERMAL PROCESSING APPARATUS USING...
- Publication number 20140064885
- Publication date Mar 6, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiko Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20120329291
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C21 - METALLURGY OF IRON
Information Patent Application
SUBSTRATE CONVEYING CONTAINER OPENING/CLOSING DEVICE, LID OPENING/C...
- Publication number 20120315114
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Katsuhiko OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE TRANSPORT METHOD, AND RECO...
- Publication number 20120230808
- Publication date Sep 13, 2012
- TOKYO ELECTRON LIMITED
- Katsuhiko Oyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CONVEYING METHOD, RECORDING MEDIUM IN WHICH PROGRAM IS RE...
- Publication number 20120230805
- Publication date Sep 13, 2012
- TOKYO ELECTRON LIMITED
- Daisuke YAMAGISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20120222615
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM
- Publication number 20120088030
- Publication date Apr 12, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION DEVICE AND FILM DEPOSITION METHOD
- Publication number 20120076937
- Publication date Mar 29, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20110214611
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20110162633
- Publication date Jul 7, 2011
- TOKYO ELECTRON LIMITED
- Hisashi Inoue
- C21 - METALLURGY OF IRON
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20110159187
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20110155056
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20110155062
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20110139074
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasushi Takeuchi

Person

Patents Grantslast 30 patents

Support structure for suspended injector and substrate processing a...

Film deposition apparatus, method of depositing film, and non-trans...

Magnetic annealing apparatus

Method for managing atmosphere in storage container

Spacer, spacer transferring method, processing method and processin...

Magnetic annealing apparatus

Cover opening/closing apparatus, thermal processing apparatus using...

Substrate conveying method, recording medium in which program is re...

Substrate transport apparatus, substrate transport method, and reco...

Heat treatment method and heat treatment apparatus

Activated gas injector, film deposition apparatus, and film deposit...

Substrate conveying container opening/closing device, lid opening/c...

Film deposition apparatus

Heat treatment method and heat treatment apparatus

Film deposition apparatus

Heat treatment method and heat treatment apparatus wherein the subs...

Vertical heat treatment apparatus and method for operating the same

Heat treatment method wherein the substrate holder is composed of t...

Processing system for object to be processed

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

Support Structure for Suspended Injector and Substrate Processing A...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD AND COMPUTER READ...

FILM DEPOSITION APPARATUS, METHOD OF DEPOSITING FILM, AND NON-TRANS...

METHOD FOR MANAGING ATMOSPHERE IN STORAGE CONTAINER

MAGNETIC ANNEALING APPARATUS

MAGNETIC ANNEALING APPARATUS

SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

TRANSPORTNG APPARATUS AND PROCESSING APPARATUS

SPACER, SPACER TRANSFERRING METHOD, PROCESSING METHOD AND PROCESSIN...

COVER OPENING/CLOSING APPARATUS, THERMAL PROCESSING APPARATUS USING...

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

SUBSTRATE CONVEYING CONTAINER OPENING/CLOSING DEVICE, LID OPENING/C...

SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE TRANSPORT METHOD, AND RECO...

SUBSTRATE CONVEYING METHOD, RECORDING MEDIUM IN WHICH PROGRAM IS RE...

FILM DEPOSITION APPARATUS

FILM FORMING APPARATUS, FILM FORMING METHOD, AND RECORDING MEDIUM

FILM DEPOSITION DEVICE AND FILM DEPOSITION METHOD

FILM DEPOSITION APPARATUS

HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS