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Yasushi Toma
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Fujisawa-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection device
Patent number
10,157,722
Issue date
Dec 18, 2018
Ebara Corporation
Masahiro Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection device
Patent number
10,002,740
Issue date
Jun 19, 2018
Ebara Corporation
Masahiro Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus
Patent number
8,946,629
Issue date
Feb 3, 2015
Ebara Corporation
Masahiro Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus
Patent number
8,742,344
Issue date
Jun 3, 2014
Ebara Corporation
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device
Patent number
8,497,476
Issue date
Jul 30, 2013
Ebara Corporation
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Grant
Method for regenerating ion exchanger
Patent number
8,133,380
Issue date
Mar 13, 2012
Ebara Corporation
Takayuki Saito
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Electrolytic processing apparatus and electrolytic processing method
Patent number
7,638,030
Issue date
Dec 29, 2009
Ebara Corporation
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Composite processing apparatus and method
Patent number
7,563,356
Issue date
Jul 21, 2009
Ebara Corporation
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electrolytic processing apparatus and electrolytic processing method
Patent number
7,527,723
Issue date
May 5, 2009
Ebara Corporation
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and device for regenerating ion exchanger, and electrolytic...
Patent number
7,427,345
Issue date
Sep 23, 2008
Ebara Corporation
Takayuki Saito
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electrochemical machining method and apparatus
Patent number
7,255,778
Issue date
Aug 14, 2007
Ebara Corporation
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and method
Patent number
7,208,076
Issue date
Apr 24, 2007
Ebara Corporation
Itsuki Kobata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrolytic processing device and substrate processing apparatus
Patent number
7,101,465
Issue date
Sep 5, 2006
Ebara Corporation
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrolytic machining method and apparatus
Patent number
6,875,335
Issue date
Apr 5, 2005
Ebara Corporation
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrochemical machining method and apparatus
Patent number
6,743,349
Issue date
Jun 1, 2004
Ebara Corporation
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrolytic machining method and apparatus
Patent number
6,602,396
Issue date
Aug 5, 2003
Ebara Corporation
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrolytic machining method and apparatus
Patent number
6,368,493
Issue date
Apr 9, 2002
Ebara Corporation
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Fast atomic beam source with an inductively coupled plasma generator
Patent number
5,883,470
Issue date
Mar 16, 1999
Ebara Corporation
Masahiro Hatakeyama
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM...
Publication number
20240274394
Publication date
Aug 15, 2024
EBARA CORPORATION
Yasushi TOMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF EVALUATING PRIMARY OPTICAL SYSTEM OF ELECTRON BEAM OBSERV...
Publication number
20230393085
Publication date
Dec 7, 2023
EBARA CORPORATION
Kenji WATANABE
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE
Publication number
20180040452
Publication date
Feb 8, 2018
EBARA CORPORATION
Masahiro HATAKEYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE
Publication number
20160307726
Publication date
Oct 20, 2016
EBARA CORPORATION
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS
Publication number
20150097116
Publication date
Apr 9, 2015
EBARA CORPORATION
Masahiro HATAKEYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS
Publication number
20140319345
Publication date
Oct 30, 2014
EBARA CORPORATION
Masahiro HATAKEYAMA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS
Publication number
20140077078
Publication date
Mar 20, 2014
Masahiro HATAKEYAMA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE
Publication number
20140014848
Publication date
Jan 16, 2014
EBARA CORPORATION
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE
Publication number
20120235036
Publication date
Sep 20, 2012
EBARA CORPORATION
Masahiro Hatakeyama
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100325913
Publication date
Dec 30, 2010
Xinming WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrolytic polishing method of substrate
Publication number
20090107851
Publication date
Apr 30, 2009
Akira Kodera
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrochemical polishing method and polishing method
Publication number
20090095637
Publication date
Apr 16, 2009
Yasushi Toma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrochemical mechanical polishing method and electrochemical mec...
Publication number
20090078583
Publication date
Mar 26, 2009
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and device for regenerating ion exchanger, and electrolytic...
Publication number
20080314763
Publication date
Dec 25, 2008
Takayuki Saito
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic Processing Apparatus
Publication number
20080217164
Publication date
Sep 11, 2008
Yasushi Toma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrochemical mechanical polishing apparatus conditioning method,...
Publication number
20080188162
Publication date
Aug 7, 2008
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Pre-polishing treatment solution for interconnect substrate, polish...
Publication number
20080171440
Publication date
Jul 17, 2008
Akira Kodera
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Electrolytic liquid for electrolytic polishing and electrolytic pol...
Publication number
20080067077
Publication date
Mar 20, 2008
Akira Kodera
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20070187257
Publication date
Aug 16, 2007
EBARA CORPORATION
Ikutaro Noji
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing apparatus and method
Publication number
20070187259
Publication date
Aug 16, 2007
Itsuki Kobata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20060289298
Publication date
Dec 28, 2006
Itsuki Kobata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Composite machining device and method
Publication number
20060175191
Publication date
Aug 10, 2006
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electolytic processing apparatus
Publication number
20060091005
Publication date
May 4, 2006
Yasushi Toma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrode for electrolytic processing
Publication number
20050183963
Publication date
Aug 25, 2005
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20050155868
Publication date
Jul 21, 2005
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20050115838
Publication date
Jun 2, 2005
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and method
Publication number
20040256237
Publication date
Dec 23, 2004
Itsuki Kobata
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Substrate processing appartus and method
Publication number
20040231989
Publication date
Nov 25, 2004
Itsuki Kobata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrochemical machining method and apparatus
Publication number
20040195109
Publication date
Oct 7, 2004
Yuzo Mori
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Electrolytic processing apparatus and electrolytic processing method
Publication number
20040129569
Publication date
Jul 8, 2004
Osamu Nabeya
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR