Yasutsugu Usami

Person

Toshina-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam apparatus
- Patent number 9,159,528
- Issue date Oct 13, 2015
- Samsung Electronics Co., Ltd.
- Takashi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 8,212,227
- Issue date Jul 3, 2012
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,977,632
- Issue date Jul 12, 2011
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 7,692,144
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,442,923
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,417,444
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method with surface height calculator a...
- Patent number 7,329,889
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 7,242,015
- Issue date Jul 10, 2007
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Micropattern shape measuring system and method
- Patent number 7,130,063
- Issue date Oct 31, 2006
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional micropattern profile measuring system and method
- Patent number 7,038,767
- Issue date May 2, 2006
- Hitachi High-Technologies Corporation
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,026,830
- Issue date Apr 11, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,979,823
- Issue date Dec 27, 2005
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method, apparatus and system for circuit pattern
- Patent number 6,919,564
- Issue date Jul 19, 2005
- Hitachi, Ltd.
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 6,919,577
- Issue date Jul 19, 2005
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method, apparatus and system for circuit pattern
- Patent number 6,903,821
- Issue date Jun 7, 2005
- Hitachi, Ltd.
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Micropattern shape measuring system and method
- Patent number 6,894,790
- Issue date May 17, 2005
- Hitachi High-Technologies Corporation
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,797,954
- Issue date Sep 28, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...
- Patent number 6,768,113
- Issue date Jul 27, 2004
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method, apparatus and system for circuit pattern
- Patent number 6,759,655
- Issue date Jul 6, 2004
- Hitachi, Ltd.
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 6,753,518
- Issue date Jun 22, 2004
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with voltage applied to the sample
- Patent number 6,635,873
- Issue date Oct 21, 2003
- Hitachi, Ltd.
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,559,663
- Issue date May 6, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM INSPECTION APPARATUS
- Publication number 20140361164
- Publication date Dec 11, 2014
- Takashi OGAWA
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20140361168
- Publication date Dec 11, 2014
- Samsung Electronics Co., Ltd.
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Exposure Or System Inspection Or Measurement Apparatu...
- Publication number 20100193686
- Publication date Aug 5, 2010
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090039259
- Publication date Feb 12, 2009
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Exposure or System Inspection Or Measurement Apparatu...
- Publication number 20080078933
- Publication date Apr 3, 2008
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20060071167
- Publication date Apr 6, 2006
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20060043982
- Publication date Mar 2, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20060017014
- Publication date Jan 26, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Electron beam exposure or system inspection or measurement apparatu...
- Publication number 20050242286
- Publication date Nov 3, 2005
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Micropattern shape measuring system and method
- Publication number 20050182595
- Publication date Aug 18, 2005
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20040222377
- Publication date Nov 11, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Electron beam exposure or system inspection or measurement apparatu...
- Publication number 20040217287
- Publication date Nov 4, 2004
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Scanning electron microscope
- Publication number 20040036021
- Publication date Feb 26, 2004
- Hitachi, Ltd
- Hideo Todokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20030169060
- Publication date Sep 11, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20030164460
- Publication date Sep 4, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030155508
- Publication date Aug 21, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030146382
- Publication date Aug 7, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030111616
- Publication date Jun 19, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Three-dimensional micropattern profile measuring system and method
- Publication number 20030090651
- Publication date May 15, 2003
- Yuya Toyoshima
- G01 - MEASURING TESTING
Information Patent Application
Micropattern shape measuring system and method
- Publication number 20030090684
- Publication date May 15, 2003
- Yasuhiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method, apparatus and system for circuit pattern
- Publication number 20030058444
- Publication date Mar 27, 2003
- Hitachi, Ltd
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20020117635
- Publication date Aug 29, 2002
- HIROYUKI SHINADA
- G01 - MEASURING TESTING
Information Patent Application
Inspection method, apparatus and system for circuit pattern
- Publication number 20020113967
- Publication date Aug 22, 2002
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection method, apparatus and system for circuit pattern
- Publication number 20020109088
- Publication date Aug 15, 2002
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING

Yasutsugu Usami

Person

Patents Grantslast 30 patents

Electron beam apparatus

Method and an apparatus of an inspection system using an electron beam

Electron beam exposure or system inspection or measurement apparatu...

Method and apparatus of an inspection system using an electron beam

Scanning electron microscope

Method and apparatus for inspecting integrated circuit pattern

Electron beam exposure or system inspection or measurement apparatu...

Scanning electron microscope

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Electron beam apparatus and method with surface height calculator a...

Patterned wafer inspection method and apparatus therefor

Method and an apparatus of an inspection system using an electron beam

Micropattern shape measuring system and method

Three-dimensional micropattern profile measuring system and method

Method and apparatus for inspecting integrated circuit pattern

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Patterned wafer inspection method and apparatus therefor

Inspection method, apparatus and system for circuit pattern

Electron beam exposure or system inspection or measurement apparatu...

Inspection method, apparatus and system for circuit pattern

Micropattern shape measuring system and method

Patterned wafer inspection method and apparatus therefor

WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...

Inspection method, apparatus and system for circuit pattern

Electron beam exposure or system inspection or measurement apparatu...

Scanning electron microscope with voltage applied to the sample

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting patterns of a semiconductor dev...

Patents Applicationslast 30 patents

ELECTRON BEAM INSPECTION APPARATUS

ELECTRON BEAM APPARATUS

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

Electron Beam Exposure Or System Inspection Or Measurement Apparatu...

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

SCANNING ELECTRON MICROSCOPE

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

Electron Beam Exposure or System Inspection Or Measurement Apparatu...

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Scanning electron microscope

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

Electron beam exposure or system inspection or measurement apparatu...

Method and an apparatus of an inspection system using an electron beam

Micropattern shape measuring system and method

Patterned wafer inspection method and apparatus therefor

Electron beam exposure or system inspection or measurement apparatu...

Scanning electron microscope

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Three-dimensional micropattern profile measuring system and method

Micropattern shape measuring system and method

Inspection method, apparatus and system for circuit pattern

PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR

Inspection method, apparatus and system for circuit pattern

Inspection method, apparatus and system for circuit pattern