Yasuyuki Motoshima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of calibrating radiation thermometer and system thereof
- Patent number 12,181,345
- Issue date Dec 31, 2024
- Ebara Corporation
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature regulating apparatus and polishing apparatus
- Patent number 12,023,777
- Issue date Jul 2, 2024
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having surface-property measuring device of pol...
- Patent number 11,958,161
- Issue date Apr 16, 2024
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,897,080
- Issue date Feb 13, 2024
- Ebara Corporation
- Masashi Kabasawa
- B24 - GRINDING POLISHING
Information Patent Grant
Pad-temperature regulating apparatus, and polishing apparatus
- Patent number 11,839,947
- Issue date Dec 12, 2023
- Ebara Corporation
- Keisuke Kamiki
- B24 - GRINDING POLISHING
Information Patent Grant
Temperature adjusting device and polishing device
- Patent number 11,577,357
- Issue date Feb 14, 2023
- Ebara Corporation
- Yasuyuki Motoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device
- Patent number 11,517,940
- Issue date Dec 6, 2022
- Ebara Corporation
- Shuji Uozumi
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus for heat exchanger and polishing apparatus
- Patent number 11,383,345
- Issue date Jul 12, 2022
- Ebara Corporation
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Apparatus for cleaning substrate and substrate cleaning method
- Patent number 11,094,548
- Issue date Aug 17, 2021
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,710,208
- Issue date Jul 14, 2020
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transfer hand
- Patent number 10,475,691
- Issue date Nov 12, 2019
- Ebara Corporation
- Toru Maruyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus and method for regulating surface temperature of polishin...
- Patent number 10,414,018
- Issue date Sep 17, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 10,259,098
- Issue date Apr 16, 2019
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,195,712
- Issue date Feb 5, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus including pad contact member with baffle in liq...
- Patent number 10,099,340
- Issue date Oct 16, 2018
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,035,238
- Issue date Jul 31, 2018
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 9,969,046
- Issue date May 15, 2018
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 9,782,870
- Issue date Oct 10, 2017
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 9,579,768
- Issue date Feb 28, 2017
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Adjusting a substrate polishing condition
- Patent number 9,561,575
- Issue date Feb 7, 2017
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having temperature regulator for polishing pad
- Patent number 9,475,167
- Issue date Oct 25, 2016
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Adjusting a substrate polishing condition
- Patent number 9,233,448
- Issue date Jan 12, 2016
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus, substrate polishing method, and appa...
- Patent number 8,845,391
- Issue date Sep 30, 2014
- Ebara Corporation
- Tadakazu Sone
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,777,198
- Issue date Jul 15, 2014
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 8,141,513
- Issue date Mar 27, 2012
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, substrate holding method, and substrat...
- Patent number 7,886,685
- Issue date Feb 15, 2011
- Ebara Corporation
- Masahiko Sekimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,575,636
- Issue date Aug 18, 2009
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,442,257
- Issue date Oct 28, 2008
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,087,117
- Issue date Aug 8, 2006
- Ebara Corporation
- Seiji Katsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND COMPUTER-READABLE STORAG...
- Publication number 20240351163
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Masayoshi ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20240033876
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Shumpei MIURA
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE HEIGHT MEASUREMENT METHOD USING DUMMY DISK
- Publication number 20230415299
- Publication date Dec 28, 2023
- EBARA CORPORATION
- HIROYUKI SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20230356267
- Publication date Nov 9, 2023
- EBARA CORPORATION
- Shuji UOZUMI
- B08 - CLEANING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220347814
- Publication date Nov 3, 2022
- EBARA CORPORATION
- BAN ITO
- B24 - GRINDING POLISHING
Information Patent Application
PAD-TEMPERATURE REGULATING APPARATUS, AND POLISHING APPARATUS
- Publication number 20220305617
- Publication date Sep 29, 2022
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CALIBRATING RADIATION THERMOMETER AND SYSTEM THEREOF
- Publication number 20220228924
- Publication date Jul 21, 2022
- EBARA CORPORATION
- Shuji Uozumi
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE REGULATING APPARATUS AND POLISHING APPARATUS
- Publication number 20220212312
- Publication date Jul 7, 2022
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS HAVING SURFACE-PROPERTY MEASURING DEVICE OF POL...
- Publication number 20210370461
- Publication date Dec 2, 2021
- EBARA CORPORATION
- Keisuke KAMIKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20210229235
- Publication date Jul 29, 2021
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20210114164
- Publication date Apr 22, 2021
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS
- Publication number 20200306920
- Publication date Oct 1, 2020
- EBARA CORPORATION
- Yasuyuki Motoshima
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
- Publication number 20200276619
- Publication date Sep 3, 2020
- EBARA CORPORATION
- Shuji UOZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY DISK, DRESSING DISK, AND SURFACE HEIGHT MEASUREMENT METHOD US...
- Publication number 20200246936
- Publication date Aug 6, 2020
- EBARA CORPORATION
- HIROYUKI SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE
- Publication number 20200188962
- Publication date Jun 18, 2020
- EBARA CORPORATION
- SHUJI UOZUMI
- B08 - CLEANING
Information Patent Application
TEMPERATURE ADJUSTING DEVICE AND POLISHING DEVICE
- Publication number 20200164480
- Publication date May 28, 2020
- EBARA CORPORATION
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS
- Publication number 20190389030
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Application
PAD TEMPERATURE ADJUSTMENT APPARATUS FOR ADJUSTING TEMPERATURE OF P...
- Publication number 20190193237
- Publication date Jun 27, 2019
- EBARA CORPORATION
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...
- Publication number 20190168354
- Publication date Jun 6, 2019
- EBARA CORPORATION
- Tadakazu SONE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20190164769
- Publication date May 30, 2019
- EBARA CORPORATION
- Shinji KAJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...
- Publication number 20190126428
- Publication date May 2, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190118334
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20180222007
- Publication date Aug 9, 2018
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20180021917
- Publication date Jan 25, 2018
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20170361420
- Publication date Dec 21, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...
- Publication number 20170239778
- Publication date Aug 24, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20170106492
- Publication date Apr 20, 2017
- EBARA CORPORATION
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSFER HAND
- Publication number 20160264365
- Publication date Sep 15, 2016
- EBARA CORPORATION
- Toru Maruyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ADJUSTING A SUBSTRATE POLISHING CONDITION
- Publication number 20160096250
- Publication date Apr 7, 2016
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20150224621
- Publication date Aug 13, 2015
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING

Yasuyuki Motoshima

Person

Patents Grantslast 30 patents

Method of calibrating radiation thermometer and system thereof

Temperature regulating apparatus and polishing apparatus

Polishing apparatus having surface-property measuring device of pol...

Polishing apparatus

Pad-temperature regulating apparatus, and polishing apparatus

Temperature adjusting device and polishing device

Substrate cleaning device

Cleaning apparatus for heat exchanger and polishing apparatus

Apparatus for cleaning substrate and substrate cleaning method

Polishing method and polishing apparatus

Substrate transfer hand

Apparatus and method for regulating surface temperature of polishin...

Method and apparatus for polishing a substrate

Polishing method and polishing apparatus

Polishing apparatus including pad contact member with baffle in liq...

Polishing method and polishing apparatus

Method and apparatus for polishing a substrate

Polishing method and polishing apparatus

Method and apparatus for polishing a substrate

Adjusting a substrate polishing condition

Polishing apparatus having temperature regulator for polishing pad

Adjusting a substrate polishing condition

Substrate polishing apparatus, substrate polishing method, and appa...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate holding apparatus, substrate holding method, and substrat...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

POLISHING METHOD, POLISHING APPARATUS, AND COMPUTER-READABLE STORAG...

POLISHING APPARATUS

SURFACE HEIGHT MEASUREMENT METHOD USING DUMMY DISK

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

POLISHING APPARATUS AND POLISHING METHOD

PAD-TEMPERATURE REGULATING APPARATUS, AND POLISHING APPARATUS

METHOD OF CALIBRATING RADIATION THERMOMETER AND SYSTEM THEREOF

TEMPERATURE REGULATING APPARATUS AND POLISHING APPARATUS

POLISHING APPARATUS HAVING SURFACE-PROPERTY MEASURING DEVICE OF POL...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

POLISHING APPARATUS

CLEANING APPARATUS FOR HEAT EXCHANGER AND POLISHING APPARATUS

CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...

DUMMY DISK, DRESSING DISK, AND SURFACE HEIGHT MEASUREMENT METHOD US...

SUBSTRATE CLEANING DEVICE

TEMPERATURE ADJUSTING DEVICE AND POLISHING DEVICE

METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS

PAD TEMPERATURE ADJUSTMENT APPARATUS FOR ADJUSTING TEMPERATURE OF P...

SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPA...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...

POLISHING METHOD AND POLISHING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

POLISHING METHOD AND POLISHING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...

POLISHING APPARATUS

SUBSTRATE TRANSFER HAND

ADJUSTING A SUBSTRATE POLISHING CONDITION

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE