Yehiel Gotkis

Person

Gilbert, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pillar-supported array of micro electron lenses
- Patent number 9,214,344
- Issue date Dec 15, 2015
- KLA-Tencor Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sharp scattering angle trap for electron beam apparatus
- Patent number 8,890,066
- Issue date Nov 18, 2014
- KLA-Tencor Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inline inspection of photovoltaics for electrical defects
- Patent number 8,427,185
- Issue date Apr 23, 2013
- KLA-Tencor Corporation
- George H. Zapalac
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Wet surface treatment by usage of a liquid bath containing energy l...
- Patent number 8,206,508
- Issue date Jun 26, 2012
- Yehiel Gotkis
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for thin metal film thickness measurement
- Patent number 8,128,278
- Issue date Mar 6, 2012
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Tungsten plug deposition quality evaluation method by EBACE technology
- Patent number 7,945,086
- Issue date May 17, 2011
- KLA-Tencor Technologies Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inline inspection of photovoltaics for electrical defects
- Patent number 7,906,972
- Issue date Mar 15, 2011
- KLA-Tencor Corporation
- George H. Zapalac, Jr.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for making semiconductor structures implementing sacrificial...
- Patent number 7,875,548
- Issue date Jan 25, 2011
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic pattern generator with cup-shaped structure
- Patent number 7,755,061
- Issue date Jul 13, 2010
- KLA-Tencor Technologies Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inline inspection of photovoltaics for electrical defects
- Patent number 7,649,365
- Issue date Jan 19, 2010
- KLA-Tencor Corporation
- George H. Zapalac, Jr.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method and apparatus for thin metal film thickness measurement
- Patent number 7,581,875
- Issue date Sep 1, 2009
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Temperature stabilization for substrate processing
- Patent number 7,528,349
- Issue date May 5, 2009
- KLA-Tencor Technologies Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure implementing sacrificial material and metho...
- Patent number 7,425,501
- Issue date Sep 16, 2008
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for real time metal film thickness measurement
- Patent number 7,309,618
- Issue date Dec 18, 2007
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for thin metal film thickness measurement
- Patent number 7,204,639
- Issue date Apr 17, 2007
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus of arrayed, clustered or coupled eddy current...
- Patent number 7,205,166
- Issue date Apr 17, 2007
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for controlling fluid material composition on...
- Patent number 7,166,015
- Issue date Jan 23, 2007
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Integration of sensor based metrology into semiconductor processing...
- Patent number 7,128,803
- Issue date Oct 31, 2006
- Lam Research Corporation
- Aleksander Owczarz
- B24 - GRINDING POLISHING
Information Patent Grant
Enhancement of eddy current based measurement capabilities
- Patent number 7,084,621
- Issue date Aug 1, 2006
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Method for chemical mechanical planarization
- Patent number 7,033,250
- Issue date Apr 25, 2006
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
End-point detection apparatus
- Patent number 7,029,369
- Issue date Apr 18, 2006
- Lam Research Corporation
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for slope to threshold conversion for process...
- Patent number 7,010,468
- Issue date Mar 7, 2006
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization system with replaceable pad assembly
- Patent number 6,994,609
- Issue date Feb 7, 2006
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor structure implementing low-K dielectric materials and...
- Patent number 6,984,892
- Issue date Jan 10, 2006
- Lam Research Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing compressed dry air usage during chemical mec...
- Patent number 6,976,906
- Issue date Dec 20, 2005
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for in-situ measuring and monitoring CMP polishin...
- Patent number 6,951,503
- Issue date Oct 4, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus of arrayed sensors for metrological control
- Patent number 6,951,624
- Issue date Oct 4, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting transitions of wafer surface pr...
- Patent number 6,937,915
- Issue date Aug 30, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Grant
Multiple-conditioning member device for chemical mechanical planari...
- Patent number 6,935,938
- Issue date Aug 30, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for metal residue detection and mapping within a...
- Patent number 6,929,531
- Issue date Aug 16, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES
- Publication number 20150340195
- Publication date Nov 26, 2015
- KLA-Tencor Corporation
- Alan D. BRODIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wet Surface Treatment By Usage of a Liquid Bath Containing Energy L...
- Publication number 20130056038
- Publication date Mar 7, 2013
- Yehiel Gotkis
- B08 - CLEANING
Information Patent Application
INLINE INSPECTION OF PHOTOVOLTAICS FOR ELECTRICAL DEFECTS
- Publication number 20110133750
- Publication date Jun 9, 2011
- KLA-Tencor Corporation
- George H. Zapalac, Jr.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
INLINE INSPECTION OF PHOTOVOLTAICS FOR ELECTRICAL DEFECTS
- Publication number 20100079147
- Publication date Apr 1, 2010
- KLA-Tencor Corporation
- George H. Zapalac, Jr.
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Methods and Apparatus for Thin Metal Film Thickness Measurement
- Publication number 20090310643
- Publication date Dec 17, 2009
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
Dynamic pattern generator with cup-shaped structure
- Publication number 20090114837
- Publication date May 7, 2009
- LUCA GRELLA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TUNGSTEN PLUG DEPOSITION QUALITY EVALUATION METHOD BY EBACE TECHNOLOGY
- Publication number 20090010526
- Publication date Jan 8, 2009
- KLA-Tencor Technologies Corporation
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Making Semiconductor Structures Implementing Sacrificial...
- Publication number 20090004845
- Publication date Jan 1, 2009
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wet Surface Treatment By Usage of a Liquid Bath Containing Energy L...
- Publication number 20080190459
- Publication date Aug 14, 2008
- Kavenaki LLC.
- Yehiel Gotkis
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS OF ARRAYED, CLUSTERED OR COUPLED EDDY CURRENT...
- Publication number 20070163712
- Publication date Jul 19, 2007
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for thin metal film thickness measurement
- Publication number 20070160107
- Publication date Jul 12, 2007
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor structure implementing sacrificial material and metho...
- Publication number 20060043596
- Publication date Mar 2, 2006
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for measurement of thin films and residues on...
- Publication number 20050211667
- Publication date Sep 29, 2005
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR STRUCTURE IMPLEMENTING LOW-K DIELECTRIC MATERIALS AND...
- Publication number 20050194688
- Publication date Sep 8, 2005
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for slope to threshold conversion for process...
- Publication number 20050125202
- Publication date Jun 9, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G05 - CONTROLLING REGULATING
Information Patent Application
Integration of sensor based metrology into semiconductor processing...
- Publication number 20050072528
- Publication date Apr 7, 2005
- Lam Research Corporation
- Aleksander Owczarz
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for wafer mechanical stress monitoring and waf...
- Publication number 20050066739
- Publication date Mar 31, 2005
- Lam Research Corporation
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
Methods for detecting transitions of wafer surface properties in ch...
- Publication number 20050054268
- Publication date Mar 10, 2005
- Lam Research Corporation
- Rodney Kistler
- B24 - GRINDING POLISHING
Information Patent Application
Complementary sensors metrological process and method and apparatus...
- Publication number 20050007107
- Publication date Jan 13, 2005
- Lam Research Corp.
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus of arrayed sensors for metrological control
- Publication number 20050000653
- Publication date Jan 6, 2005
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
Method for chemical mechanical planarization
- Publication number 20040238493
- Publication date Dec 2, 2004
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
CMP belt stretch compensation apparatus and methods for using the same
- Publication number 20040224610
- Publication date Nov 11, 2004
- Lam Research Corp.
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for controlling fluid material composition on...
- Publication number 20040219867
- Publication date Nov 4, 2004
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for controlling film thickness in a chemical m...
- Publication number 20040214508
- Publication date Oct 28, 2004
- LAM RESEARCH CORPORATION
- Yehiel Gotkis
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus of arrayed, clustered or coupled eddy current...
- Publication number 20040206455
- Publication date Oct 21, 2004
- Lam Research Corporation
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
System and method for polishing and planarizing semiconductor wafer...
- Publication number 20040166782
- Publication date Aug 26, 2004
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
End-point detection apparatus
- Publication number 20040157531
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- Katrina A. Mikhaylich
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING...
- Publication number 20040119468
- Publication date Jun 24, 2004
- Lam Research Corp.
- Yehiel Gotkis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR THIN-FILM SUBSTRATE SIGNAL SEPARAT...
- Publication number 20040119469
- Publication date Jun 24, 2004
- LAM CORPORATION
- Yehiel Gotkis
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for slope to threshold conversion for process...
- Publication number 20040117054
- Publication date Jun 17, 2004
- Lam Research Corporation
- Yehiel Gotkis
- G05 - CONTROLLING REGULATING

Yehiel Gotkis

Person

Patents Grantslast 30 patents

Pillar-supported array of micro electron lenses

Sharp scattering angle trap for electron beam apparatus

Inline inspection of photovoltaics for electrical defects

Wet surface treatment by usage of a liquid bath containing energy l...

Methods and apparatus for thin metal film thickness measurement

Tungsten plug deposition quality evaluation method by EBACE technology

Inline inspection of photovoltaics for electrical defects

Method for making semiconductor structures implementing sacrificial...

Dynamic pattern generator with cup-shaped structure

Inline inspection of photovoltaics for electrical defects

Method and apparatus for thin metal film thickness measurement

Temperature stabilization for substrate processing

Semiconductor structure implementing sacrificial material and metho...

Method and apparatus for real time metal film thickness measurement

Method and apparatus for thin metal film thickness measurement

Method and apparatus of arrayed, clustered or coupled eddy current...

Apparatus and method for controlling fluid material composition on...

Integration of sensor based metrology into semiconductor processing...

Enhancement of eddy current based measurement capabilities

Method for chemical mechanical planarization

End-point detection apparatus

Method and apparatus for slope to threshold conversion for process...

Chemical mechanical planarization system with replaceable pad assembly

Semiconductor structure implementing low-K dielectric materials and...

Apparatus for reducing compressed dry air usage during chemical mec...

System and method for in-situ measuring and monitoring CMP polishin...

Method and apparatus of arrayed sensors for metrological control

Apparatus and methods for detecting transitions of wafer surface pr...

Multiple-conditioning member device for chemical mechanical planari...

System and method for metal residue detection and mapping within a...

Patents Applicationslast 30 patents

PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES

Wet Surface Treatment By Usage of a Liquid Bath Containing Energy L...

INLINE INSPECTION OF PHOTOVOLTAICS FOR ELECTRICAL DEFECTS

INLINE INSPECTION OF PHOTOVOLTAICS FOR ELECTRICAL DEFECTS

Methods and Apparatus for Thin Metal Film Thickness Measurement

Dynamic pattern generator with cup-shaped structure

TUNGSTEN PLUG DEPOSITION QUALITY EVALUATION METHOD BY EBACE TECHNOLOGY

Method for Making Semiconductor Structures Implementing Sacrificial...

Wet Surface Treatment By Usage of a Liquid Bath Containing Energy L...

METHOD AND APPARATUS OF ARRAYED, CLUSTERED OR COUPLED EDDY CURRENT...

Method and apparatus for thin metal film thickness measurement

Semiconductor structure implementing sacrificial material and metho...

Method and apparatus for measurement of thin films and residues on...

SEMICONDUCTOR STRUCTURE IMPLEMENTING LOW-K DIELECTRIC MATERIALS AND...

Method and apparatus for slope to threshold conversion for process...

Integration of sensor based metrology into semiconductor processing...

Method and apparatus for wafer mechanical stress monitoring and waf...

Methods for detecting transitions of wafer surface properties in ch...

Complementary sensors metrological process and method and apparatus...

Method and apparatus of arrayed sensors for metrological control

Method for chemical mechanical planarization

CMP belt stretch compensation apparatus and methods for using the same

Apparatus and method for controlling fluid material composition on...

Apparatus and method for controlling film thickness in a chemical m...

Method and apparatus of arrayed, clustered or coupled eddy current...

System and method for polishing and planarizing semiconductor wafer...

End-point detection apparatus

METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING...

SYSTEM, METHOD AND APPARATUS FOR THIN-FILM SUBSTRATE SIGNAL SEPARAT...

Method and apparatus for slope to threshold conversion for process...