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Yeong Rvey Shiue
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Hsin-Chu, TW
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last 30 patents
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Patent Grant
Method of forming a TiN/W barrier layer for a hot Al plug
Patent number
5,963,830
Issue date
Oct 5, 1999
Mosel Vitelic Incorporated
Pei-Jan Wang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for forming metal plug
Patent number
5,776,833
Issue date
Jul 7, 1998
Mosel Vitelic Inc.
Hsi-Chieh Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of in-situ wafer cooling for a sequential WSI/alpha -Si sput...
Patent number
5,770,515
Issue date
Jun 23, 1998
Mosel Vitelic Incorporated
Hsien-Liang Meng
H01 - BASIC ELECTRIC ELEMENTS