Yicheng Li

Person

Tsukui, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Sealing device and method for a processing system
- Patent number 7,794,546
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust apparatus configured to reduce particle contamination in a...
- Patent number 7,740,705
- Issue date Jun 22, 2010
- Tokyo Electron Limited
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system for a vacuum processing system
- Patent number 7,670,432
- Issue date Mar 2, 2010
- Tokyo Electron Limited
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber for manufacturing semiconductors
- Patent number D593969
- Issue date Jun 9, 2009
- Tokyo Electron Limited
- Yicheng Li
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Processing chamber for manufacturing semiconductors
- Patent number D589472
- Issue date Mar 31, 2009
- Tokyo Electron Limited
- Yicheng Li
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Sheet type heat treating apparatus and method for processing semico...
- Patent number 7,029,505
- Issue date Apr 18, 2006
- Tokyo Electron Limited
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system
- Patent number 6,891,131
- Issue date May 10, 2005
- Tokyo Electron Limited
- Takeshi Sakuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system and thermal processing method
- Patent number 6,889,004
- Issue date May 3, 2005
- Tokyo Electron Limited
- Yicheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and method for semiconductor process and semicon...
- Patent number 6,845,292
- Issue date Jan 18, 2005
- Tokyo Electron Limited
- Lin Sha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal process apparatus for a semiconductor substrate
- Patent number 6,641,302
- Issue date Nov 4, 2003
- Tokyo Electron Limited
- Yicheng Li
- G01 - MEASURING TESTING
Information Patent Grant
Single-substrate-heat-processing apparatus for semiconductor process
- Patent number 6,448,536
- Issue date Sep 10, 2002
- Tokyo Electron Limited
- Yicheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus having a thin light-transmitting window
- Patent number 6,437,290
- Issue date Aug 20, 2002
- Tokyo Electron Limited
- Shouqian Shao
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thermal processing apparatus having a coolant passage
- Patent number 6,403,926
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Yicheng Li
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...
- Publication number 20120315404
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRAVIOLET-RAY-ASSISTED PROCESSING APPARATUS FOR SEMICONDUCTOR PRO...
- Publication number 20080127895
- Publication date Jun 5, 2008
- Shou-Qian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust apparatus configured to reduce particle contamination in a...
- Publication number 20070212484
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust system for a vacuum processing system
- Publication number 20070209588
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sealing device and method for a processing system
- Publication number 20070209590
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116873
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
- Publication number 20070116872
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Yicheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sheet type heat treating device and method for processing semicondu...
- Publication number 20050260835
- Publication date Nov 24, 2005
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transfer apparatus and method for semiconductor process and semicon...
- Publication number 20040158347
- Publication date Aug 12, 2004
- Lin Sha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultraviolet ray assisted processing device for semiconductor proces...
- Publication number 20040149215
- Publication date Aug 5, 2004
- Shou-Qian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal processing system
- Publication number 20040013419
- Publication date Jan 22, 2004
- Takeshi Sakuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal processing system and thermal processing method
- Publication number 20030089697
- Publication date May 15, 2003
- Yicheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal process apparatus for a semiconductor substrate
- Publication number 20020041620
- Publication date Apr 11, 2002
- Yicheng Li
- G01 - MEASURING TESTING
Information Patent Application
Heat treatment apparatus having a thin light-transmitting window
- Publication number 20020030047
- Publication date Mar 14, 2002
- Shouqian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal processing apparatus having a coolant passage
- Publication number 20010042742
- Publication date Nov 22, 2001
- Yicheng Li
- C30 - CRYSTAL GROWTH
Information Patent Application
Single-substrate-heat-processing apparatus for semiconductor process
- Publication number 20010027970
- Publication date Oct 11, 2001
- Yicheng Li
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Sealing device and method for a processing system

Exhaust apparatus configured to reduce particle contamination in a...

Exhaust system for a vacuum processing system

Processing chamber for manufacturing semiconductors

Processing chamber for manufacturing semiconductors

Sheet type heat treating apparatus and method for processing semico...

Thermal processing system

Thermal processing system and thermal processing method

Transfer apparatus and method for semiconductor process and semicon...

Thermal process apparatus for a semiconductor substrate

Single-substrate-heat-processing apparatus for semiconductor process

Heat treatment apparatus having a thin light-transmitting window

Thermal processing apparatus having a coolant passage

Patents Applicationslast 30 patents

APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...

ULTRAVIOLET-RAY-ASSISTED PROCESSING APPARATUS FOR SEMICONDUCTOR PRO...

Exhaust apparatus configured to reduce particle contamination in a...

Exhaust system for a vacuum processing system

Sealing device and method for a processing system

Apparatus for thermal and plasma enhanced vapor deposition and meth...

Apparatus for thermal and plasma enhanced vapor deposition and meth...

Sheet type heat treating device and method for processing semicondu...

Transfer apparatus and method for semiconductor process and semicon...

Ultraviolet ray assisted processing device for semiconductor proces...

Thermal processing system

Thermal processing system and thermal processing method

Thermal process apparatus for a semiconductor substrate

Heat treatment apparatus having a thin light-transmitting window

Thermal processing apparatus having a coolant passage

Single-substrate-heat-processing apparatus for semiconductor process