Yiting Zhang

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone cooling of plasma heated window
- Patent number 11,538,666
- Issue date Dec 27, 2022
- Lam Research Corporation
- Yiting Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of on-wafer cd uniformity with movable edge ring and gas in...
- Patent number 11,424,103
- Issue date Aug 23, 2022
- Lam Research Corporation
- Yiting Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of on-wafer CD uniformity with movable edge ring and gas in...
- Patent number 10,410,832
- Issue date Sep 10, 2019
- Lam Research Corporation
- Yiting Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Near-substrate supplemental plasma density generation with low bias...
- Patent number 10,242,845
- Issue date Mar 26, 2019
- Lam Research Corporation
- Zhongkui Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer etching in continuous plasma
- Patent number 9,991,128
- Issue date Jun 5, 2018
- Lam Research Corporation
- Zhongkui Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Line edge roughness improvement with sidewall sputtering
- Patent number 9,852,924
- Issue date Dec 26, 2017
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-ZONE COOLING OF PLASMA HEATED WINDOW
- Publication number 20230121097
- Publication date Apr 20, 2023
- LAM RESEARCH CORPORATION
- Yiting ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...
- Publication number 20190362940
- Publication date Nov 28, 2019
- LAM RESEARCH CORPORATION
- Yiting Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Zone Cooling Of Plasma Heated Window
- Publication number 20190148118
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- Yiting ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Near-Substrate Supplemental Plasma Density Generation with Low Bias...
- Publication number 20180204708
- Publication date Jul 19, 2018
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...
- Publication number 20180053629
- Publication date Feb 22, 2018
- LAM RESEARCH CORPORATION
- Yiting Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA
- Publication number 20170229311
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yiting Zhang

Person

Patents Grantslast 30 patents

Multi-zone cooling of plasma heated window

Control of on-wafer cd uniformity with movable edge ring and gas in...

Control of on-wafer CD uniformity with movable edge ring and gas in...

Near-substrate supplemental plasma density generation with low bias...

Atomic layer etching in continuous plasma

Line edge roughness improvement with sidewall sputtering

Patents Applicationslast 30 patents

MULTI-ZONE COOLING OF PLASMA HEATED WINDOW

CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...

Multi-Zone Cooling Of Plasma Heated Window

Near-Substrate Supplemental Plasma Density Generation with Low Bias...

CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS IN...

ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA