Yo-Cheng Hsueh

Follow

Person

Tao-yuan, TW

People

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the prevention of arcing in a CVD-TiN chamber
- Publication number 20050133165
- Publication date Jun 23, 2005
- Taiwan Semiconductor Manufacturing Co.
- Kuang-Hsing Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...