Yoichi Honda

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Kumamoto-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,770,149
- Issue date Aug 3, 2004
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate process method and substrate process apparatus
- Patent number 6,443,641
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Hideyuki Takamori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,398,879
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,391,110
- Issue date May 21, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate process method and substrate process apparatus
- Patent number 6,261,007
- Issue date Jul 17, 2001
- Tokyo Electron Limited
- Hideyuki Takamori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,159,288
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for cleaning treatment
- Publication number 20020162574
- Publication date Nov 7, 2002
- Fumio Satou
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Substrate process method and substrate process apparatus
- Publication number 20010031147
- Publication date Oct 18, 2001
- Hideyuki Takamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate process method and substrate process apparatus
- Publication number 20010026691
- Publication date Oct 4, 2001
- Hideyuki Takamori
- H01 - BASIC ELECTRIC ELEMENTS