Yoji Mizutani

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 7,205,024
- Issue date Apr 17, 2007
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Heat treatment method, heat treatment apparatus and treatment system
- Patent number 6,979,474
- Issue date Dec 27, 2005
- Tokyo Electron Limited
- Yuji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas treatment apparatus
- Patent number 6,808,567
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,726,775
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas treatment apparatus
- Patent number 6,660,096
- Issue date Dec 9, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming system
- Patent number 6,656,273
- Issue date Dec 2, 2003
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,589,339
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Heat treatment method, heat treatment apparatus and treatment system
- Patent number 6,261,365
- Issue date Jul 17, 2001
- Tokyo Electron Limited
- Yuji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating apparatus including aging unit and solvent replacement...
- Patent number 6,248,168
- Issue date Jun 19, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus, substrate conveying apparatus, film forming...
- Patent number 6,197,385
- Issue date Mar 6, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas treatment apparatus
- Patent number 6,190,459
- Issue date Feb 20, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for substrates to be processed
- Patent number 5,704,981
- Issue date Jan 6, 1998
- Tokyo Electron Ltd.
- Shunji Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20070197046
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Yoji Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20060292298
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20040156996
- Publication date Aug 12, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas treatment apparatus
- Publication number 20040045184
- Publication date Mar 11, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20040013817
- Publication date Jan 22, 2004
- Yoji Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20030196595
- Publication date Oct 23, 2003
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment method, heat treatment apparatus and treatment system
- Publication number 20010029890
- Publication date Oct 18, 2001
- TOKYO ELECTRON LIMITED
- Yuji Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20010017103
- Publication date Aug 30, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas treatment apparatus
- Publication number 20010000198
- Publication date Apr 12, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Yoji Mizutani

Person

Patents Grantslast 30 patents

Method of coating film, coating unit, aging unit, solvent replaceme...

Heat treatment method, heat treatment apparatus and treatment system

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus

Film forming method and film forming system

Method of coating film, coating unit, aging unit, solvent replaceme...

Heat treatment method, heat treatment apparatus and treatment system

Spin coating apparatus including aging unit and solvent replacement...

Film forming apparatus, substrate conveying apparatus, film forming...

Gas treatment apparatus

Processing apparatus for substrates to be processed

Patents Applicationslast 30 patents

Substrate processing method and substrate processing apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus

Substrate processing method and substrate processing apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Heat treatment method, heat treatment apparatus and treatment system

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus