Yong CAO

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High critical temperature metal nitride layer with oxide or oxynitr...
- Patent number 12,185,643
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Zihao Yang
- G02 - OPTICS
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 12,183,560
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,176,205
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,142,478
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making high critical temperature metal nitride layer
- Patent number 12,096,701
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Zihao Yang
Information Patent Grant
Method of making high critical temperature metal nitride layer
- Patent number 12,052,935
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Zihao Yang
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and devices for subtractive self-alignment
- Patent number 11,908,696
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing high quality PVD films
- Patent number 11,802,349
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Zihao Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for deposition of multilayer device with super...
- Patent number 11,778,926
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for deposition of metal nitrides
- Patent number 11,739,418
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making high critical temperature metal nitride layer
- Patent number 11,678,589
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Zihao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High critical temperature metal nitride layer with oxide or oxynitr...
- Patent number 11,600,761
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Zihao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 11,600,477
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 11,572,618
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack for lithography applications
- Patent number 11,495,461
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 11,469,096
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of reducing particles in a physical vapor deposition (PVD)...
- Patent number 11,450,514
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wei Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for deposition of multilayer device with super...
- Patent number 11,437,559
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) chamber with reduced arcing
- Patent number 11,393,665
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Chao Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing amorphous silicon layers or silicon oxycarbi...
- Patent number 11,313,034
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Weimin Zeng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and devices for subtractive self-alignment
- Patent number 11,257,677
- Issue date Feb 22, 2022
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for substrate edge uniformity
- Patent number 11,056,325
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Thanh X. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of making and using tin oxide film with smooth surface morp...
- Patent number 10,991,579
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Weimin Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit and method for processing a substrate
- Patent number 10,886,113
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Thanh X. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical stack deposition and on-board metrology
- Patent number 10,886,155
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Mingwei Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing dielectric barrier layers and aluminum conta...
- Patent number 10,707,122
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Sree Rangasai V. Kesapragada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for thin film material deposition using reactive plasma-fre...
- Patent number 10,665,426
- Issue date May 26, 2020
- Applied Materials, Inc.
- Yana Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to reduce trap-induced capacitance in interconnect dielectri...
- Patent number 10,546,742
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- He Ren
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER WITH OXIDE OR OXYNITR...
- Publication number 20230345846
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Zihao Yang
- G02 - OPTICS
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20230335393
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER
- Publication number 20230329125
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Zihao Yang
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20230187191
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20220415649
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Deposition of Multilayer Device with Super...
- Publication number 20220384705
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Mingwei Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF REDUCING PARTICLES IN A PHYSICAL VAPOR DEPOSITION (PVD)...
- Publication number 20220301828
- Publication date Sep 22, 2022
- Wei DOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20220186361
- Publication date Jun 16, 2022
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND DEVICES FOR SUBTRACTIVE SELF-ALIGNMENT
- Publication number 20220130676
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER WITH OXIDE OR OXYNITR...
- Publication number 20220052248
- Publication date Feb 17, 2022
- Applied Materials, Inc.
- Zihao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER
- Publication number 20220013707
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Zihao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER
- Publication number 20220013708
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Zihao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES FOR SUBTRACTIVE SELF-ALIGNMENT
- Publication number 20210233770
- Publication date Jul 29, 2021
- Applied Materials, Inc.
- He Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS
- Publication number 20210123156
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Zihao YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20210062325
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20200350160
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Deposition of Multilayer Device with Super...
- Publication number 20200303616
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES
- Publication number 20200299830
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STACK FOR LITHOGRAPHY APPLICATIONS
- Publication number 20200273705
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Tejinder SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL STACK DEPOSITION AND ON-BOARD METROLOGY
- Publication number 20200227294
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Mingwei ZHU
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF CLEANING AN OXIDE LAYER IN A FILM STACK TO ELIMINATE ARC...
- Publication number 20200203144
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- CHAO DU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING TEST VEHICLE AND METHOD OF USE THEREOF
- Publication number 20200105626
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- MINGDONG LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION ( PVD) CHAMBER WITH REDUCED ARCING
- Publication number 20200051795
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- CHAO DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MAKING AND USING TIN OXIDE FILM WITH SMOOTH SURFACE MORP...
- Publication number 20190341248
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- WEIMIN ZENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD Films For EUV Lithography
- Publication number 20190212656
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Huixiong Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO REDUCE TRAP-INDUCED CAPACITANCE IN INTERCONNECT DIELECTRI...
- Publication number 20190189433
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- He REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY
- Publication number 20190189407
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- THANH X. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

High critical temperature metal nitride layer with oxide or oxynitr...

Gas injection process kit to eliminate arcing and improve uniform g...

Method and chamber for backside physical vapor deposition

Method and chamber for backside physical vapor deposition

Method of making high critical temperature metal nitride layer

Method of making high critical temperature metal nitride layer

Cleaning of SIN with CCP plasma or RPS clean

Cleaning of sin with CCP plasma or RPS clean

Methods and devices for subtractive self-alignment

Method for depositing high quality PVD films

Method and apparatus for deposition of multilayer device with super...

Method and apparatus for deposition of metal nitrides

Method of making high critical temperature metal nitride layer

High critical temperature metal nitride layer with oxide or oxynitr...

Gas injection process kit to eliminate arcing and improve uniform g...

Method and chamber for backside physical vapor deposition

Film stack for lithography applications

Method and chamber for backside physical vapor deposition

Methods of reducing particles in a physical vapor deposition (PVD)...

Method and apparatus for deposition of multilayer device with super...

Physical vapor deposition (PVD) chamber with reduced arcing

Methods for depositing amorphous silicon layers or silicon oxycarbi...

Methods and devices for subtractive self-alignment

Methods and apparatus for substrate edge uniformity

Methods of making and using tin oxide film with smooth surface morp...

Process kit and method for processing a substrate

Optical stack deposition and on-board metrology

Methods for depositing dielectric barrier layers and aluminum conta...

Methods for thin film material deposition using reactive plasma-fre...

Method to reduce trap-induced capacitance in interconnect dielectri...

Patents Applicationslast 30 patents

Method and Apparatus for Deposition of Mental Nitrides

HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER WITH OXIDE OR OXYNITR...

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

Method and Apparatus for Deposition of Multilayer Device with Super...

METHODS OF REDUCING PARTICLES IN A PHYSICAL VAPOR DEPOSITION (PVD)...

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

METHODS AND DEVICES FOR SUBTRACTIVE SELF-ALIGNMENT

HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER WITH OXIDE OR OXYNITR...

METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER

METHOD OF MAKING HIGH CRITICAL TEMPERATURE METAL NITRIDE LAYER

METHODS AND DEVICES FOR SUBTRACTIVE SELF-ALIGNMENT

METHOD FOR DEPOSITING HIGH QUALITY PVD FILMS

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

Method and Apparatus for Deposition of Multilayer Device with Super...

METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES

FILM STACK FOR LITHOGRAPHY APPLICATIONS

OPTICAL STACK DEPOSITION AND ON-BOARD METROLOGY

METHODS OF CLEANING AN OXIDE LAYER IN A FILM STACK TO ELIMINATE ARC...

ARCING TEST VEHICLE AND METHOD OF USE THEREOF

PHYSICAL VAPOR DEPOSITION ( PVD) CHAMBER WITH REDUCED ARCING

METHODS OF MAKING AND USING TIN OXIDE FILM WITH SMOOTH SURFACE MORP...

PVD Films For EUV Lithography

METHOD TO REDUCE TRAP-INDUCED CAPACITANCE IN INTERCONNECT DIELECTRI...

METHODS AND APPARATUS FOR SUBSTRATE EDGE UNIFORMITY