Yong-jin Chun

Person

Daejeon, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography metrology method for determining best focus and best do...
- Patent number 9,606,452
- Issue date Mar 28, 2017
- Samsung Electronics Co., Ltd.
- Byung-Je Jung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of detecting focus shift in lithography process, method of a...
- Patent number 9,570,364
- Issue date Feb 14, 2017
- Samsung Electronics Co., Ltd.
- Yong-Jin Chun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for analyzing mask topography and method of forming image us...
- Patent number 8,045,787
- Issue date Oct 25, 2011
- Samsung Electronics Co., Ltd.
- Soo-han Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compensating masks, multi-optical systems using the masks, and meth...
- Patent number 7,940,373
- Issue date May 10, 2011
- Samsung Electronics Co., Ltd.
- Sung-soo Suh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY METROLOGY METHOD FOR DETERMINING BEST FOCUS AND BEST DO...
- Publication number 20160085155
- Publication date Mar 24, 2016
- Samsung Electronics Co., Ltd.
- BYUNG-JE JUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DETECTING FOCUS SHIFT IN LITHOGRAPHY PROCESS, METHOD OF A...
- Publication number 20160055288
- Publication date Feb 25, 2016
- Samsung Electronics Co., Ltd.
- Yong-Jin CHUN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Illumination Control Module, and Diffraction Illumination System an...
- Publication number 20100248155
- Publication date Sep 30, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Woo-Seok Shim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for analyzing mask topography and method of forming image us...
- Publication number 20080175432
- Publication date Jul 24, 2008
- Samsung Electronics Co., Ltd.
- Soo-han Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compensating Masks, Multi-Optical Systems Using the Masks, and Meth...
- Publication number 20080106719
- Publication date May 8, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Sung-soo Suh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of forming image contour for predicting semiconductor device...
- Publication number 20080076047
- Publication date Mar 27, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Yong-jin Chun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yong-jin Chun

Person

Patents Grantslast 30 patents

Lithography metrology method for determining best focus and best do...

Method of detecting focus shift in lithography process, method of a...

System for analyzing mask topography and method of forming image us...

Compensating masks, multi-optical systems using the masks, and meth...

Patents Applicationslast 30 patents

LITHOGRAPHY METROLOGY METHOD FOR DETERMINING BEST FOCUS AND BEST DO...

METHOD OF DETECTING FOCUS SHIFT IN LITHOGRAPHY PROCESS, METHOD OF A...

Illumination Control Module, and Diffraction Illumination System an...

System for analyzing mask topography and method of forming image us...

Compensating Masks, Multi-Optical Systems Using the Masks, and Meth...

Method of forming image contour for predicting semiconductor device...