YOSHIAKI DAIGO

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Susceptor cover
- Patent number D1047884
- Issue date Oct 22, 2024
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Susceptor ring
- Patent number D1037186
- Issue date Jul 30, 2024
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,749,525
- Issue date Sep 5, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth method
- Patent number 11,482,416
- Issue date Oct 25, 2022
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,299,821
- Issue date Apr 12, 2022
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, vacuum processing apparatus, method of manuf...
- Patent number 11,035,034
- Issue date Jun 15, 2021
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial film forming method, sputtering apparatus, manufacturing...
- Patent number 10,844,470
- Issue date Nov 24, 2020
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,501,849
- Issue date Dec 10, 2019
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, method of manufacturing semiconductor light-em...
- Patent number 10,224,463
- Issue date Mar 5, 2019
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial film forming method, sputtering apparatus, manufacturing...
- Patent number 9,379,279
- Issue date Jun 28, 2016
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, vacuum processing apparatus, semiconductor lig...
- Patent number 9,309,606
- Issue date Apr 12, 2016
- Canon Anelva Corporation
- Yoshiaki Daigo
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial film forming method, vacuum processing apparatus, semicon...
- Patent number 9,252,322
- Issue date Feb 2, 2016
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATER LIFE PREDICTION METHOD, HEAT TREATMENT APPARATUS, AND COMPUT...
- Publication number 20240186192
- Publication date Jun 6, 2024
- NUFLARE TECHNOLOGY, INC.
- Toru WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
- Publication number 20230313411
- Publication date Oct 5, 2023
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20230304187
- Publication date Sep 28, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshikazu MORIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20230257904
- Publication date Aug 17, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH METHOD AND VAPOR PHASE GROWTH APPARATUS
- Publication number 20230145614
- Publication date May 11, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING APPARATUS AND PLATE
- Publication number 20230044440
- Publication date Feb 9, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
- Publication number 20220195618
- Publication date Jun 23, 2022
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECTIFYING PLATE, FLUID-INTRODUCING APPARATUS, AND FILM-FORMING APP...
- Publication number 20220134359
- Publication date May 5, 2022
- Kabushiki Kaisha Toshiba
- Yuki FURUTANI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SiC EPITAXIAL GROWTH APPARATUS
- Publication number 20220005696
- Publication date Jan 6, 2022
- NUFLARE TECHNOLOGY, INC.
- Ichiro MIZUSHIMA
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20210381128
- Publication date Dec 9, 2021
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
DEPOSITION METHOD, DEPOSITION APPARATUS, SUSCEPTOR UNIT, AND SPACER...
- Publication number 20210292897
- Publication date Sep 23, 2021
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20210180208
- Publication date Jun 17, 2021
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
- Publication number 20200190692
- Publication date Jun 18, 2020
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH METHOD
- Publication number 20200185220
- Publication date Jun 11, 2020
- NuFlare Technology, Inc.
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180119280
- Publication date May 3, 2018
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
- Publication number 20170309480
- Publication date Oct 26, 2017
- Canon ANELVA Corporation
- Yoshiaki Daigo
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMATION METHOD, VACUUM PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20170145588
- Publication date May 25, 2017
- Canon ANELVA Corporation
- YOSHIAKI DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR LIGHT-EM...
- Publication number 20150311399
- Publication date Oct 29, 2015
- Canon ANELVA Corporation
- YOSHIAKI DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
- Publication number 20150102371
- Publication date Apr 16, 2015
- Canon ANELVA Corporation
- YOSHIAKI DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
SrRuO3 FILM DEPOSITION METHOD
- Publication number 20140360863
- Publication date Dec 11, 2014
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, VACUUM PROCESSING APPARATUS, SEMICONDUCTOR LIG...
- Publication number 20140225154
- Publication date Aug 14, 2014
- Canon ANELVA Corporation
- YOSHIAKI DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
- Publication number 20130277206
- Publication date Oct 24, 2013
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL FILM FORMING METHOD, VACUUM PROCESSING APPARATUS, SEMICON...
- Publication number 20130049064
- Publication date Feb 28, 2013
- CANON ANELVA CORPORATION
- Yoshiaki DAIGO
- C30 - CRYSTAL GROWTH
Information Patent Application
TARGET STRUCTURE AND TARGET HOLDING APPARATUS
- Publication number 20090078564
- Publication date Mar 26, 2009
- Canon ANELVA Corporation
- Keiji Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

YOSHIAKI DAIGO

Person

Patents Grantslast 30 patents

Susceptor cover

Susceptor ring

Vapor phase growth apparatus and vapor phase growth method

Vapor phase growth method

Vapor phase growth apparatus and vapor phase growth method

Film formation method, vacuum processing apparatus, method of manuf...

Epitaxial film forming method, sputtering apparatus, manufacturing...

Film forming apparatus and film forming method

Film forming method, method of manufacturing semiconductor light-em...

Epitaxial film forming method, sputtering apparatus, manufacturing...

Film forming method, vacuum processing apparatus, semiconductor lig...

Epitaxial film forming method, vacuum processing apparatus, semicon...

Patents Applicationslast 30 patents

HEATER LIFE PREDICTION METHOD, HEAT TREATMENT APPARATUS, AND COMPUT...

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

FILM DEPOSITION METHOD

VAPOR PHASE GROWTH APPARATUS

VAPOR PHASE GROWTH METHOD AND VAPOR PHASE GROWTH APPARATUS

FILM FORMING APPARATUS AND PLATE

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

RECTIFYING PLATE, FLUID-INTRODUCING APPARATUS, AND FILM-FORMING APP...

SiC EPITAXIAL GROWTH APPARATUS

VAPOR PHASE GROWTH APPARATUS

DEPOSITION METHOD, DEPOSITION APPARATUS, SUSCEPTOR UNIT, AND SPACER...

VAPOR PHASE GROWTH APPARATUS

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

VAPOR PHASE GROWTH METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...

FILM FORMATION METHOD, VACUUM PROCESSING APPARATUS, METHOD OF MANUF...

FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR LIGHT-EM...

EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...

SrRuO3 FILM DEPOSITION METHOD

FILM FORMING METHOD, VACUUM PROCESSING APPARATUS, SEMICONDUCTOR LIG...

EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...

EPITAXIAL FILM FORMING METHOD, VACUUM PROCESSING APPARATUS, SEMICON...

TARGET STRUCTURE AND TARGET HOLDING APPARATUS