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Yoshihiko YANAGISAWA
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Toyama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Heating element, substrate processing apparatus and method of manuf...
Patent number
11,309,195
Issue date
Apr 19, 2022
Kokusai Electric Corporation
Yoshihiko Yanagisawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,265,977
Issue date
Mar 1, 2022
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,177,143
Issue date
Nov 16, 2021
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating element, substrate processing apparatus, and method of manu...
Patent number
11,127,608
Issue date
Sep 21, 2021
Kokusai Electric Corporation
Yoshihiko Yanagisawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,018,033
Issue date
May 25, 2021
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and substrate processing...
Patent number
9,546,422
Issue date
Jan 17, 2017
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition processing apparatus to reduce heat energy...
Patent number
9,518,321
Issue date
Dec 13, 2016
Hitachi Kokusai Electric Inc.
Mitsuro Tanabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
Patent number
8,222,161
Issue date
Jul 17, 2012
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and semiconductor device producing m...
Patent number
8,172,950
Issue date
May 8, 2012
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and semiconductor devices manufactur...
Patent number
7,943,528
Issue date
May 17, 2011
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
Publication number
20240249960
Publication date
Jul 25, 2024
Kokusai Electric Corporation
Kazuya NABETA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230307267
Publication date
Sep 28, 2023
Kokusai Electric Corporation
Katsuhiko YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220282369
Publication date
Sep 8, 2022
Kokusai Electric Corporation
Yoshihiko YANAGISAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE RETAINER AND METHOD OF MA...
Publication number
20220093435
Publication date
Mar 24, 2022
Kokusai Electric Corporation
Kenji SHINOZAKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
Publication number
20210407865
Publication date
Dec 30, 2021
Kokusai Electric Corporation
Kenji SHINOZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
Publication number
20210166945
Publication date
Jun 3, 2021
Kokusai Electric Corporation
Yukitomo HIROCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20200194287
Publication date
Jun 18, 2020
Kokusai Electric Corporation
Yukitomo HIROCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING ELEMENT, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANU...
Publication number
20200152490
Publication date
May 14, 2020
Kokusai Electric Corporation
Yoshihiko YANAGISAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20190393056
Publication date
Dec 26, 2019
Kokusai Electric Corporation
Yukitomo HIROCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING ELEMENT, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUF...
Publication number
20190378731
Publication date
Dec 12, 2019
Kokusai Electric Corporation
Yoshihiko YANAGISAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20190182915
Publication date
Jun 13, 2019
Kokusai Electric Corporation
Yukitomo HIROCHI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170186634
Publication date
Jun 29, 2017
Hitachi Kokusai Electric Inc.
Yoshihiko YANAGISAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20160379848
Publication date
Dec 29, 2016
Hitachi Kokusai Electric Inc.
Yoshihiko YANAGISAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20160079101
Publication date
Mar 17, 2016
Hitachi Kokusai Electric Inc.
Hidehiro YANAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION PROCESSING APPARATUS TO REDUCE HEAT ENERGY...
Publication number
20160032457
Publication date
Feb 4, 2016
Hitachi Kokusai Electric Inc.
Mitsuro TANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING MET...
Publication number
20150050815
Publication date
Feb 19, 2015
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
Publication number
20110192347
Publication date
Aug 11, 2011
Hitachi Kokusai Electric Inc.
Yoshihiko YANAGISAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTUR...
Publication number
20110053382
Publication date
Mar 3, 2011
Hitachi Kokusai Electric Inc.
Yoshihiko YANAGISAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing apparatus and semiconductor device producing m...
Publication number
20090017641
Publication date
Jan 15, 2009
Hitachi Kokusai Electric Inc.
Yoshihiko Yanagisawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...