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Yoshihiro Katsumata
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Fuchu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gate valve apparatus
Patent number
6,386,511
Issue date
May 14, 2002
Anelva Corporation
Kazuhito Watanabe
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Process for preventing deposition on inner surfaces of CVD reactor
Patent number
5,728,629
Issue date
Mar 17, 1998
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated module multi-chamber CVD processing system and its metho...
Patent number
5,534,072
Issue date
Jul 9, 1996
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated module multi-chamber CVD processing system and its metho...
Patent number
5,505,779
Issue date
Apr 9, 1996
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated module multi-chamber CVD processing system and its metho...
Patent number
5,494,494
Issue date
Feb 27, 1996
Anelva Corporation
Shigeru Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Substrate transfer system and substrate processing apparatus
Publication number
20010007630
Publication date
Jul 12, 2001
Yoshihiro Katsumata
H01 - BASIC ELECTRIC ELEMENTS