Number | Date | Country | Kind |
---|---|---|---|
4-190040 | Jun 1992 | JPX |
This application is a divisional of application Ser. No. 08/077,687, filed Jun. 16, 1993.
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4565157 | Brors et al. | Jan 1986 | |
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4957777 | Iiderem et al. | Sep 1990 | |
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5091208 | Pryor | Feb 1992 | |
5094885 | Selbrede | Mar 1992 | |
5102495 | Maher et al. | Apr 1992 | |
5108569 | Gilboa et al. | Apr 1992 | |
5108779 | Gasworth | Apr 1992 | |
5123375 | Hansen | Jun 1992 | |
5133284 | Thomas et al. | Jul 1992 | |
5158644 | Cheung et al. | Oct 1992 | |
5160544 | Garg et al. | Nov 1992 | |
5169685 | Woodruff et al. | Dec 1992 | |
5175017 | Kobayashi et al. | Dec 1992 | |
5183402 | Cooke et al. | Feb 1993 | |
5186594 | Toshima et al. | Feb 1993 | |
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5203956 | Hansen | Apr 1993 | |
5230741 | van de Ven et al. | Jul 1993 | |
5242501 | McDiramid | Sep 1993 | |
5304248 | Cheng et al. | Apr 1994 | |
5306380 | Hiroki | Apr 1994 | |
5314509 | Kato et al. | May 1994 | |
5326725 | Sherstinksy et al. | Jul 1994 |
Number | Date | Country |
---|---|---|
0476676 | Mar 1992 | EPX |
0476480 | Mar 1992 | EPX |
61-8153 | Mar 1986 | JPX |
61-30030 | Jul 1986 | JPX |
63-238263 | Oct 1988 | JPX |
4-225225 | Aug 1992 | JPX |
4-345022 | Dec 1992 | JPX |
5-21579 | Jan 1993 | JPX |
WO9107773 | May 1991 | WOX |
Entry |
---|
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Catalogue of Anelva Corp. "Multi-Chamber Metal CVD System", Jun. 1992. |
Technical Proceedings Semicon/West; "Wafer Transport Innovations for Multi-Process Integration"; May 21-23, 1985; Brian Hardegen et al., pp. 51-57. |
Semiconductor World; Nov. 1991, pp. 344-345 "Model 6000 Series" of Genus Inc. |
Semiconductor World; Nov. 1991, pp. 346-347 "Precision 5000 WCVD" of Applied Materials Inc. |
Semiconductor World; Nov. 1991, pp. 348-349 Concept One-W of Novellus Systems, Inc. |
Semiconductor World; Nov. 1991, pp. 350-351 ERA-2000 of ULVAC Japan Ltd. |
Semiconductor World; Nov. 1991, pp. 352-353 C7000 of Tel-Varian Ltd. |
Semiconductor World; Nov. 1991, pp. 354-355 ILC 1060M-CVD. |
Technical Proceedings Semicon West; Multichamber System for Chemical Vapor Deposition Method; Tetsuo Ishida et al.; pp. 83-90; Jun. 1990. |
Technical Proceedings Semicon West; Selective CVD-W Utilizing SiH.sub.4 Reduction; Kenji Numajiri et al.; pp. 66-77; Nov. 1989. |
Number | Date | Country | |
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Parent | 77687 | Jun 1993 |