Yoshiko Okui

Follow

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate cleaning method and semiconductor device fa...
- Patent number 5,795,494
- Issue date Aug 18, 1998
- Fujitsu Limited
- Yuka Hayami
- B08 - CLEANING
Information Patent Grant
Apparatus made of silica for semiconductor device fabrication
- Patent number 5,395,452
- Issue date Mar 7, 1995
- Fujitsu Limited
- Masanori Kobayashi
- C30 - CRYSTAL GROWTH