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4722752 | Steck | Feb 1988 | |
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5451267 | Stadler et al. | Sep 1995 | |
5464480 | Matthews | Nov 1995 | |
5567244 | Lee et al. | Oct 1996 |
Number | Date | Country |
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43 40 589 | Dec 1992 | DEX |
01-150328 | Jun 1989 | JPX |
2-164035 | Jun 1990 | JPX |
03-157927 | Jul 1991 | JPX |
04-040270 | Feb 1992 | JPX |
04-124825 | Apr 1992 | JPX |
4-151835 | May 1992 | JPX |
6-053201 | Feb 1994 | JPX |
843 029 | May 1982 | SUX |
Entry |
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Journal of the Electrochemical Society, vol. 140, No. 3, Mar. 1993, T. Ohmi et al., "Native Oxide Growth and Organic Impurity Removal on Si Surface with Ozone-Injected Ultrapure Water"--pp. 804-810. |