Yoshio Kawamura

Person

Hitachi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,603,194
- Issue date Oct 13, 2009
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,392,106
- Issue date Jun 24, 2008
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,310,563
- Issue date Dec 18, 2007
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication system and fabrication method
- Patent number 7,062,344
- Issue date Jun 13, 2006
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planarizing method of semiconductor wafer and apparatus thereof
- Patent number 6,777,337
- Issue date Aug 17, 2004
- Renesas Technology Corporation
- Kan Yasui
- B24 - GRINDING POLISHING
Information Patent Grant
Method of polishing a semiconductor device
- Patent number 6,734,103
- Issue date May 11, 2004
- Hitachi, Ltd.
- Souichi Katagiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device fabricating method
- Patent number 6,723,144
- Issue date Apr 20, 2004
- Hitachi, Ltd.
- Souichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing surface of semiconductor device substrate
- Patent number 6,663,468
- Issue date Dec 16, 2003
- Hitachi, Ltd.
- Yoshio Kawamura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for fabricating semiconductor device and processing apparatu...
- Patent number 6,612,912
- Issue date Sep 2, 2003
- Hitachi, Ltd.
- Kan Yasui
- B24 - GRINDING POLISHING
Information Patent Grant
Processing method, measuring method and producing method of semicon...
- Patent number 6,589,871
- Issue date Jul 8, 2003
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for planarizing semiconductor device
- Patent number 6,565,424
- Issue date May 20, 2003
- Hitachi, Ltd.
- Souichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor device fabricating method
- Patent number 6,524,961
- Issue date Feb 25, 2003
- Hitachi, Ltd.
- Souichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Grant
Fabrication system and fabrication method
- Patent number 6,099,598
- Issue date Aug 8, 2000
- Hitachi, Ltd.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus for transferring articles wit...
- Patent number 6,077,027
- Issue date Jun 20, 2000
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fabricating semiconductor devices
- Patent number 5,981,399
- Issue date Nov 9, 1999
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus for transferring articles wit...
- Patent number 5,971,701
- Issue date Oct 26, 1999
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication system and method having inter-apparatus transporter
- Patent number 5,858,863
- Issue date Jan 12, 1999
- Hitachi, Ltd.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication system and method having inter-apparatus transporter
- Patent number 5,820,679
- Issue date Oct 13, 1998
- Hitachi, Ltd.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method and equipment for processing a semiconductor devi...
- Patent number 5,628,828
- Issue date May 13, 1997
- Hitachi., Ltd.
- Yoshio Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing method
- Patent number 5,609,511
- Issue date Mar 11, 1997
- Hitachi, Ltd.
- Shigeo Moriyama
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer transport method
- Patent number 5,601,686
- Issue date Feb 11, 1997
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport method
- Patent number 5,562,800
- Issue date Oct 8, 1996
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information recording disk, its production method and recording app...
- Patent number 5,548,454
- Issue date Aug 20, 1996
- Hitachi, Ltd.
- Youichi Kawakubo
- G11 - INFORMATION STORAGE
Information Patent Grant
Valve and semiconductor fabricating equipment using the same
- Patent number 5,380,396
- Issue date Jan 10, 1995
- Hitachi, Ltd.
- Mitsuhiro Shikida
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Method for improving the rate of cell fusion
- Patent number 5,346,825
- Issue date Sep 13, 1994
- Hitachi, Ltd.
- Yoshio Kawamura
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Biological cell treatment method and apparatus
- Patent number 5,308,757
- Issue date May 3, 1994
- Hitachi, Ltd.
- Yoshio Kawamura
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Valve and semiconductor fabricating equipment using the same
- Patent number 5,284,179
- Issue date Feb 8, 1994
- Hitachi, Ltd.
- Mitsuhiro Shikida
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Cell handling method for cell fusion processor
- Patent number 5,183,744
- Issue date Feb 2, 1993
- Hitachi, Ltd.
- Yoshio Kawamura
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Cell handling apparatus
- Patent number 5,154,814
- Issue date Oct 13, 1992
- Hitachi, Ltd.
- Yoshio Kawamura
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Cell manipulating apparatus
- Patent number 4,895,805
- Issue date Jan 23, 1990
- Hitachi, Ltd.
- Kazuo Sato
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...

Patents Applicationslast 30 patents

Information Patent Application
FABRICATION SYSTEM AND FABRICATION METHOD
- Publication number 20100131093
- Publication date May 27, 2010
- Renesas Technology Corp.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20080243293
- Publication date Oct 2, 2008
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20060111802
- Publication date May 25, 2006
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20060111805
- Publication date May 25, 2006
- RENESAS TECHNOLOGY CORP.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication system and fabrication method
- Publication number 20040107020
- Publication date Jun 3, 2004
- Hitachi, Ltd.
- Natsuki Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for polishing surface of semiconductor device substrate
- Publication number 20040048554
- Publication date Mar 11, 2004
- Hitachi, Ltd.
- Yoshio Kawamura
- B24 - GRINDING POLISHING
Information Patent Application
Semiconductor device fabricating method
- Publication number 20030084998
- Publication date May 8, 2003
- Souichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for manufacturing semiconductor device
- Publication number 20020160609
- Publication date Oct 31, 2002
- Souichi Katagiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEE ATTACHED LIST (K. YASUI ET AL)
- Publication number 20020119733
- Publication date Aug 29, 2002
- KAN YASUI
- B24 - GRINDING POLISHING
Information Patent Application
Processing method, measuring method and producing method of semicon...
- Publication number 20020076933
- Publication date Jun 20, 2002
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for planarizing semiconductor device
- Publication number 20020049026
- Publication date Apr 25, 2002
- Souichi Katagiri
- B24 - GRINDING POLISHING
Information Patent Application
Planarizing method of semiconductor wafer and apparatus thereof
- Publication number 20020028581
- Publication date Mar 7, 2002
- HITACHI LTD.
- Kan Yasui
- B24 - GRINDING POLISHING
Information Patent Application
Method for polishing surface of semicon-ductor device substrate
- Publication number 20010007795
- Publication date Jul 12, 2001
- Yoshio Kawamura
- B24 - GRINDING POLISHING

Yoshio Kawamura

Person

Patents Grantslast 30 patents

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Planarizing method of semiconductor wafer and apparatus thereof

Method of polishing a semiconductor device

Semiconductor device fabricating method

Method for polishing surface of semiconductor device substrate

Method for fabricating semiconductor device and processing apparatu...

Processing method, measuring method and producing method of semicon...

Method and apparatus for planarizing semiconductor device

Semiconductor device fabricating method

Fabrication system and fabrication method

Semiconductor manufacturing apparatus for transferring articles wit...

Method and apparatus for fabricating semiconductor devices

Semiconductor manufacturing apparatus for transferring articles wit...

Fabrication system and method having inter-apparatus transporter

Fabrication system and method having inter-apparatus transporter

Processing method and equipment for processing a semiconductor devi...

Polishing method

Wafer transport method

Wafer transport method

Information recording disk, its production method and recording app...

Valve and semiconductor fabricating equipment using the same

Method for improving the rate of cell fusion

Biological cell treatment method and apparatus

Valve and semiconductor fabricating equipment using the same

Cell handling method for cell fusion processor

Cell handling apparatus

Cell manipulating apparatus

Patents Applicationslast 30 patents

FABRICATION SYSTEM AND FABRICATION METHOD

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Fabrication system and fabrication method

Method for polishing surface of semiconductor device substrate

Semiconductor device fabricating method

Method and apparatus for manufacturing semiconductor device

SEE ATTACHED LIST (K. YASUI ET AL)

Processing method, measuring method and producing method of semicon...

Method and apparatus for planarizing semiconductor device

Planarizing method of semiconductor wafer and apparatus thereof

Method for polishing surface of semicon-ductor device substrate