Number | Date | Country | Kind |
---|---|---|---|
8-023663 | Feb 1996 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4730976 | Davis et al. | Mar 1988 | |
4951601 | Maydan et al. | Aug 1990 | |
5147175 | Tada | Sep 1992 | |
5186718 | Tepman et al. | Feb 1993 | |
5227708 | Lowrance | Jul 1993 | |
5288199 | Enomoto | Feb 1994 | |
5447409 | Grunes et al. | Sep 1995 | |
5570994 | Somekh et al. | Nov 1996 | |
5636963 | Haraguchi et al. | Jun 1997 | |
5697749 | Iwabuchi et al. | Dec 1997 |
Number | Date | Country |
---|---|---|
60-184678 | Sep 1985 | JPX |
60-183736 | Sep 1985 | JPX |
61-87351 | May 1986 | JPX |
61-161608 | Jul 1986 | JPX |
61-278149 | Dec 1986 | JPX |
63-28047 | Feb 1988 | JPX |
63-252439 | Oct 1988 | JPX |
3-19252 | Jan 1991 | JPX |
3-234495 | Oct 1991 | JPX |
3-234494 | Oct 1991 | JPX |
4-87785 | Mar 1992 | JPX |
4-206547 | Jul 1992 | JPX |
4-279043 | Oct 1992 | JPX |
4-294984 | Oct 1992 | JPX |
6-15592 | Jan 1994 | JPX |
6-50402 | Feb 1994 | JPX |
6-132380 | May 1994 | JPX |
6-323332 | Nov 1994 | JPX |
7-1375 | Jan 1995 | JPX |
Entry |
---|
Y. Kawamura et al, "A Wafer-Handling Interface That Operates Under Process Chamber Ambient Conditions", ISSM '96, Oct. 1996, pp. 117-120. |
ISSM '96, Oct. 2, 1996, Tokyo. |