Yosimitu Kato

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern-forming method and lithographic system
- Patent number 6,093,931
- Issue date Jul 25, 2000
- Kabushiki Kaisha Toshiba
- Kazuyoshi Sugihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern-forming method and lithographic system
- Patent number 5,994,030
- Issue date Nov 30, 1999
- Kabushiki Kaisha Toshiba
- Kazuyoshi Sugihara
- B82 - NANO-TECHNOLOGY