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Youhei Fujishima
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Ageo-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Projection optical system, exposure apparatus, and device productio...
Patent number
7,154,585
Issue date
Dec 26, 2006
Nikon Corporation
Koji Shigematsu
G02 - OPTICS
Information
Patent Grant
Projection optical system, a projection exposure apparatus, and a p...
Patent number
6,912,094
Issue date
Jun 28, 2005
Nikon Corporation
Koji Shigematsu
G02 - OPTICS
Information
Patent Grant
Production method of projection optical system
Patent number
6,788,389
Issue date
Sep 7, 2004
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
Projection Optical System, Exposure Equipment and Exposure Method
Publication number
20080123074
Publication date
May 29, 2008
Nikon Corporation
Youhei Fujishima
G02 - OPTICS
Information
Patent Application
Projection optical system, exposure apparatus, and device productio...
Publication number
20040009415
Publication date
Jan 15, 2004
Nikon Corporation
Koji Shigematsu
G02 - OPTICS
Information
Patent Application
Production method of projection optical system
Publication number
20030053036
Publication date
Mar 20, 2003
Nikon Corporation
Youhei Fujishima
C30 - CRYSTAL GROWTH
Information
Patent Application
Projection optical system, a projection exposure apparatus, and a p...
Publication number
20030007138
Publication date
Jan 9, 2003
Nikon Corporation
Koji Shigematsu
G02 - OPTICS