Youzou Fukagawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor chip designing method, non-transitory storage medium...
- Patent number 10,810,340
- Issue date Oct 20, 2020
- LLC SUUGAKUYA HONPO
- Youzou Fukagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus, method of obtaining amount of regulation of obj...
- Patent number 9,310,695
- Issue date Apr 12, 2016
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G02 - OPTICS
Information Patent Grant
Method, apparatus and medium for determining the intensity distribu...
- Patent number 8,811,714
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Yuichi Gyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus, control apparatus and method of manufa...
- Patent number 8,493,551
- Issue date Jul 23, 2013
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination method, exposure method and storage medium
- Patent number 8,450,031
- Issue date May 28, 2013
- Canon Kabushiki Kaisha
- Yuichi Gyoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device manufacturing method
- Patent number 7,894,039
- Issue date Feb 22, 2011
- Canon Kabushiki Kaisha
- Ryuhei Miyashiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining chip arrangement position on s...
- Patent number 7,346,886
- Issue date Mar 18, 2008
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical apparatus, method of determining position of optical elemen...
- Patent number 7,301,615
- Issue date Nov 27, 2007
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G02 - OPTICS
Information Patent Grant
Optical apparatus, method of determining position of optical elemen...
- Patent number 7,230,692
- Issue date Jun 12, 2007
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G02 - OPTICS
Information Patent Grant
Scanning exposure technique
- Patent number 7,084,957
- Issue date Aug 1, 2006
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Distortion measurement method and exposure apparatus
- Patent number 6,947,119
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chip arrangement determining apparatus and method
- Patent number 6,854,105
- Issue date Feb 8, 2005
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Illumination system and scan type exposure apparatus
- Patent number 6,081,319
- Issue date Jun 27, 2000
- Canon Kabushiki Kaisha
- Kunitaka Ozawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy quantity control method
- Patent number 5,878,068
- Issue date Mar 2, 1999
- Canon Kabushiki Kaisha
- Reiji Mitarai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage device and pattern transfer system using the same
- Patent number 5,684,856
- Issue date Nov 4, 1997
- Canon Kabushiki Kaisha
- Hirohito Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR CHIP DESIGNING METHOD, SEMICONDUCTOR CHIP DESIGNING P...
- Publication number 20200175218
- Publication date Jun 4, 2020
- LLC Suugakuya Honpo
- Youzou FUKAGAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160354969
- Publication date Dec 8, 2016
- Canon Kabushiki Kaisha
- Norikazu Baba
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS, METHOD OF OBTAINING AMOUNT OF REGULATION OF OBJ...
- Publication number 20140313499
- Publication date Oct 23, 2014
- Youzou Fukagawa
- G02 - OPTICS
Information Patent Application
DETERMINATION METHOD, EXPOSURE METHOD AND STORAGE MEDIUM
- Publication number 20120052448
- Publication date Mar 1, 2012
- Canon Kabushiki Kaisha
- Yuichi GYODA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD, EXPOSURE METHOD, AND STORAGE MEDIUM
- Publication number 20120051622
- Publication date Mar 1, 2012
- Canon Kabushiki Kaisha
- Yuichi GYODA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS, CONTROL APPARATUS AND METHOD OF MANUFA...
- Publication number 20110090475
- Publication date Apr 21, 2011
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...
- Publication number 20100002212
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20070268472
- Publication date Nov 22, 2007
- Canon Kabushiki Kaisha
- Ryuhei Miyashiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS, METHOD OF DETERMINING POSITION OF OPTICAL ELEMEN...
- Publication number 20070115458
- Publication date May 24, 2007
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G02 - OPTICS
Information Patent Application
Method and apparatus for determining chip arrangement position on s...
- Publication number 20050253215
- Publication date Nov 17, 2005
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning exposure technique
- Publication number 20050036124
- Publication date Feb 17, 2005
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Distortion measurement method and exposure apparatus
- Publication number 20040119956
- Publication date Jun 24, 2004
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chip arrangement determining apparatus and method
- Publication number 20030172365
- Publication date Sep 11, 2003
- Canon Kabushiki Kaisha
- Youzou Fukagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Stage system in projection exposure apparatus
- Publication number 20010006422
- Publication date Jul 5, 2001
- Youzou Fukagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Youzou Fukagawa

Person

Patents Grantslast 30 patents

Semiconductor chip designing method, non-transitory storage medium...

Exposure apparatus, method of obtaining amount of regulation of obj...

Method, apparatus and medium for determining the intensity distribu...

Scanning exposure apparatus, control apparatus and method of manufa...

Determination method, exposure method and storage medium

Exposure apparatus and method, and device manufacturing method

Method and apparatus for determining chip arrangement position on s...

Optical apparatus, method of determining position of optical elemen...

Optical apparatus, method of determining position of optical elemen...

Scanning exposure technique

Distortion measurement method and exposure apparatus

Chip arrangement determining apparatus and method

Illumination system and scan type exposure apparatus

Energy quantity control method

Stage device and pattern transfer system using the same

Patents Applicationslast 30 patents

SEMICONDUCTOR CHIP DESIGNING METHOD, SEMICONDUCTOR CHIP DESIGNING P...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS, METHOD OF OBTAINING AMOUNT OF REGULATION OF OBJ...

DETERMINATION METHOD, EXPOSURE METHOD AND STORAGE MEDIUM

DETERMINATION METHOD, EXPOSURE METHOD, AND STORAGE MEDIUM

SCANNING EXPOSURE APPARATUS, CONTROL APPARATUS AND METHOD OF MANUFA...

SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...

EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD

OPTICAL APPARATUS, METHOD OF DETERMINING POSITION OF OPTICAL ELEMEN...

Method and apparatus for determining chip arrangement position on s...

Scanning exposure technique

Distortion measurement method and exposure apparatus

Chip arrangement determining apparatus and method

Stage system in projection exposure apparatus