Yu Chang

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic devices for expansion
- Patent number 11,594,832
- Issue date Feb 28, 2023
- Super Micro Computer, Inc.
- Hsiao Chung Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Slip ring for use in rotatable substrate support
- Patent number 11,495,932
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Muhannad Mustafa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick disconnect resistance temperature detector assembly for rotat...
- Patent number 10,704,142
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition chamber with thermal lid
- Patent number 10,407,771
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with improved RF return
- Patent number 10,134,615
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Aravind Miyar Kamath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support for substrate backside contamination control
- Patent number 9,490,150
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with a ceiling electrode supply conduit having a suc...
- Patent number 9,202,674
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Olkan Cuvalci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing oxides
- Patent number 8,846,163
- Issue date Sep 30, 2014
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled lid assembly for tungsten nitride deposition
- Patent number 8,821,637
- Issue date Sep 2, 2014
- Applied Materials, Inc.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homing of arbitrary scan path of a rotating magnetron
- Patent number 8,721,847
- Issue date May 13, 2014
- Applied Materials, Inc.
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with substrate heater and symmetric RF return
- Patent number 8,618,446
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Yu Chang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus and method for capturing images of a scene
- Patent number 8,279,267
- Issue date Oct 2, 2012
- MediaTek Inc.
- Wan-Yu Chen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Control of arbitrary scan path of a rotating magnetron
- Patent number 8,114,256
- Issue date Feb 14, 2012
- Applied Materials, Inc.
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graph-based method for dynamic fractional frequency reuse
- Patent number 8,023,462
- Issue date Sep 20, 2011
- Mitsubishi Electric Research Laboratories, Inc.
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Direct real-time monitoring and feedback control of RF plasma outpu...
- Patent number 7,910,853
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- David T. Or
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graph-based method for allocating resources in OFDMA networks
- Patent number 7,907,508
- Issue date Mar 15, 2011
- Mitsubishi Electric Research Labs, Inc.
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Graph-based method for allocating resources in OFDMA networks
- Patent number 7,903,537
- Issue date Mar 8, 2011
- Mitsubishi Electric Research Labs, Inc.
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for measuring a thickness of a layer of a wafer
- Patent number 7,777,483
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,767,024
- Issue date Aug 3, 2010
- Appplied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for front end of line fabrication
- Patent number 7,520,957
- Issue date Apr 21, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,396,480
- Issue date Jul 8, 2008
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of dynamically measuring thickness of a layer...
- Patent number 7,355,394
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Valve control system for atomic layer deposition chamber
- Patent number 7,201,803
- Issue date Apr 10, 2007
- Applied Materials, Inc.
- Siqing Lu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for dynamically measuring the thickness of an...
- Patent number 7,112,961
- Issue date Sep 26, 2006
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Valve control system for atomic layer deposition chamber
- Patent number 6,734,020
- Issue date May 11, 2004
- Applied Materials, Inc.
- Siqing Lu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-zone resistive heater
- Patent number 6,646,235
- Issue date Nov 11, 2003
- Applied Materials, Inc.
- Steven Aihua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wiring arrangement ensuring all-or-none operation of a series of mo...
- Patent number 6,618,265
- Issue date Sep 9, 2003
- Applied Materials, Inc.
- Fong M. Chang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Integrated parallel channel optical monitoring for parallel optics...
- Patent number 6,526,076
- Issue date Feb 25, 2003
- Agilent Technologies, Inc.
- Kit M. Cham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate processing chamber having interchangeable l...
- Patent number 6,500,263
- Issue date Dec 31, 2002
- Applied Materials, Inc,
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR IMPROVING STANDARD-POWER FREQUENCY BAND UT...
- Publication number 20240298305
- Publication date Sep 5, 2024
- MEDIATEK INC.
- You-Wei Chen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20230244270
- Publication date Aug 3, 2023
- Apple Inc.
- Yu-Po Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRONIC DEVICES
- Publication number 20210257761
- Publication date Aug 19, 2021
- SUPER MICRO COMPUTER, INC.
- HSIAO CHUNG CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUICK DISCONNECT RESISTANCE TEMPERATURE DETECTOR ASSEMBLY FOR ROTAT...
- Publication number 20190032210
- Publication date Jan 31, 2019
- Applied Materials, Inc.
- Muhannad MUSTAFA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLIP RING FOR USE IN ROTATABLE SUBSTRATE SUPPORT
- Publication number 20180358768
- Publication date Dec 13, 2018
- Muhannad Mustafa
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE SUPPORT WITH IMPROVED RF RETURN
- Publication number 20160240426
- Publication date Aug 18, 2016
- Applied Materials, Inc.
- ARAVIND MIYAR KAMATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
- Publication number 20160097119
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- ANQING CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR CHEMICAL DELIVERY SYSTEM
- Publication number 20140137961
- Publication date May 22, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM
- Publication number 20140076234
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL
- Publication number 20140008349
- Publication date Jan 9, 2014
- Applied Materials, Inc.
- GWO-CHUAN TZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN
- Publication number 20130001215
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- YU CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20120244704
- Publication date Sep 27, 2012
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Homing of arbitrary scan path of a rotating magnetron
- Publication number 20120103800
- Publication date May 3, 2012
- Applied Materials, Inc.
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-LINE DEPOSITION SYSTEM
- Publication number 20120017973
- Publication date Jan 26, 2012
- Markus E. Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20110223755
- Publication date Sep 15, 2011
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CAPTURING IMAGES OF A SCENE
- Publication number 20100225745
- Publication date Sep 9, 2010
- Wan-Yu Chen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...
- Publication number 20100096085
- Publication date Apr 22, 2010
- Applied Materials, Inc.
- OLKAN CUVALCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Radio Frequency Allocation for Base Station Cooperation wit...
- Publication number 20100081441
- Publication date Apr 1, 2010
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Graph-Based Method for Dynamic Fractional Frequency Reuse
- Publication number 20100061469
- Publication date Mar 11, 2010
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Graph-Based Method for Allocating Resources in OFDMA Networks
- Publication number 20090245085
- Publication date Oct 1, 2009
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Graph-Based Method for Allocating Resources in OFDMA Networks
- Publication number 20090245086
- Publication date Oct 1, 2009
- Zhifeng Tao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
DIRECT REAL-TIME MONITORING AND FEEDBACK CONTROL OF RF PLASMA OUTPU...
- Publication number 20090218324
- Publication date Sep 3, 2009
- APPLIED MATERIALS, INC.
- David T. Or
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF ARBITRARY SCAN PATH OF A ROTATING MAGNETRON
- Publication number 20090139854
- Publication date Jun 4, 2009
- Applied Materials, Inc.
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20090111280
- Publication date Apr 30, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FRONT END OF LINE FABRICATION
- Publication number 20080268645
- Publication date Oct 30, 2008
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION
- Publication number 20080202425
- Publication date Aug 28, 2008
- APPLIED MATERIALS, INC.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...
- Publication number 20080206987
- Publication date Aug 28, 2008
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS
- Publication number 20080186022
- Publication date Aug 7, 2008
- Applied Materials, Inc., a Delaware corporation
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring object thickness
- Publication number 20070063698
- Publication date Mar 22, 2007
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Substrate processing chamber having heated showerhead assembly

Electronic devices for expansion

Slip ring for use in rotatable substrate support

Quick disconnect resistance temperature detector assembly for rotat...

Atomic layer deposition chamber with thermal lid

Substrate support with improved RF return

Substrate support for substrate backside contamination control

Plasma reactor with a ceiling electrode supply conduit having a suc...

Method for removing oxides

Temperature controlled lid assembly for tungsten nitride deposition

Homing of arbitrary scan path of a rotating magnetron

Substrate support with substrate heater and symmetric RF return

Apparatus and method for capturing images of a scene

Control of arbitrary scan path of a rotating magnetron

Graph-based method for dynamic fractional frequency reuse

Direct real-time monitoring and feedback control of RF plasma outpu...

Graph-based method for allocating resources in OFDMA networks

Graph-based method for allocating resources in OFDMA networks

Method and apparatus for measuring a thickness of a layer of a wafer

Method for front end of line fabrication

Lid assembly for front end of line fabrication

Method for front end of line fabrication

Apparatus and method of dynamically measuring thickness of a layer...

Valve control system for atomic layer deposition chamber

Method and apparatus for dynamically measuring the thickness of an...

Valve control system for atomic layer deposition chamber

Multi-zone resistive heater

Wiring arrangement ensuring all-or-none operation of a series of mo...

Integrated parallel channel optical monitoring for parallel optics...

Semiconductor substrate processing chamber having interchangeable l...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR IMPROVING STANDARD-POWER FREQUENCY BAND UT...

ELECTRONIC DEVICE

ELECTRONIC DEVICES

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

QUICK DISCONNECT RESISTANCE TEMPERATURE DETECTOR ASSEMBLY FOR ROTAT...

SLIP RING FOR USE IN ROTATABLE SUBSTRATE SUPPORT

SUBSTRATE SUPPORT WITH IMPROVED RF RETURN

ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID

MODULAR CHEMICAL DELIVERY SYSTEM

MULTI CHAMBER PROCESSING SYSTEM

SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL

SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN

METHOD FOR REMOVING OXIDES

Homing of arbitrary scan path of a rotating magnetron

IN-LINE DEPOSITION SYSTEM

METHOD FOR REMOVING OXIDES

APPARATUS AND METHOD FOR CAPTURING IMAGES OF A SCENE

PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...

Dynamic Radio Frequency Allocation for Base Station Cooperation wit...

Graph-Based Method for Dynamic Fractional Frequency Reuse

Graph-Based Method for Allocating Resources in OFDMA Networks

Graph-Based Method for Allocating Resources in OFDMA Networks

DIRECT REAL-TIME MONITORING AND FEEDBACK CONTROL OF RF PLASMA OUTPU...

CONTROL OF ARBITRARY SCAN PATH OF A ROTATING MAGNETRON

METHOD FOR REMOVING OXIDES

METHOD FOR FRONT END OF LINE FABRICATION

TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION

PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...

METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS

Method and apparatus for measuring object thickness