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Yu Pan
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San Jose, CA, US
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last 30 patents
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Patent Grant
Atomic layer deposition on 3D NAND structures
Patent number
11,972,952
Issue date
Apr 30, 2024
Lam Research Corporation
Ruopeng Deng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
Publication number
20250051908
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Kevin Qiwen CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION ON 3D NAND STRUCTURES
Publication number
20240266177
Publication date
Aug 8, 2024
LAM RESEARCH CORPORATION
Ruopeng Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW RESISTANCE PULSED CVD TUNGSTEN
Publication number
20240006180
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Yu PAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW RESISTANCE GATE OXIDE METALLIZATION LINER
Publication number
20230290639
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHUCKS FEATURING RECESSED REGIONS NEAR OUT...
Publication number
20230010049
Publication date
Jan 12, 2023
LAM RESEARCH CORPORATION
Ravi Vellanki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ATOMIC LAYER DEPOSITION ON 3D NAND STRUCTURES
Publication number
20210335617
Publication date
Oct 28, 2021
LAM RESEARCH CORPORATION
Ruopeng Deng
H01 - BASIC ELECTRIC ELEMENTS