Yufei Chen

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems, methods and apparatus for post-chemical mechanical planari...
- Patent number 10,256,120
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Clinton P. Sakata
- B08 - CLEANING
Information Patent Grant
Disk-brush cleaner module with fluid jet
- Patent number 9,646,859
- Issue date May 9, 2017
- Applied Materials, Inc.
- Hui Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing delamination during chemical mechanical polishing
- Patent number 7,244,168
- Issue date Jul 17, 2007
- Applied Materials, Inc.
- Yufei Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for reducing delamination during chemical mechanical polishing
- Patent number 7,037,174
- Issue date May 2, 2006
- Applied Materials, Inc.
- Yufei Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Scrubber operation
- Patent number 6,558,471
- Issue date May 6, 2003
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS, METHODS AND APPARATUS FOR POST-CHEMICAL MECHANICAL PLANARI...
- Publication number 20150114430
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Clinton P. Sakata
- B08 - CLEANING
Information Patent Application
SLURRY FOR PLANARIZING PHOTORESIST
- Publication number 20130189843
- Publication date Jul 25, 2013
- You Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SLURRY FOR COBALT APPLICATIONS
- Publication number 20130186850
- Publication date Jul 25, 2013
- APPLIED MATERIALS, INC.
- You Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
DISK-BRUSH CLEANER MODULE WITH FLUID JET
- Publication number 20110265816
- Publication date Nov 3, 2011
- Applied Materials, Inc.
- Hui Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY COMPOSITION FOR GST PHASE CHANGE MEMORY MATERIALS POLISHING
- Publication number 20100130013
- Publication date May 27, 2010
- Applied Materials, Inc.
- Feng Q. Liu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE
- Publication number 20090036039
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Ho Seon Shin
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE
- Publication number 20090036042
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Ho Seon Shin
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE
- Publication number 20090029629
- Publication date Jan 29, 2009
- APPLIED MATERIALS, INC.
- Ho Seon Shin
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR LOW COST AND HIGH PERFORMANCE POLISHING T...
- Publication number 20080293331
- Publication date Nov 27, 2008
- Applied Materials, Inc.
- Yufei Chen
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR CLEANING A SUBSTRATE EDGE USING CHEMICAL...
- Publication number 20080207093
- Publication date Aug 28, 2008
- APPLIED MATERIALS, INC.
- Sen-Hou Ko
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE
- Publication number 20070238393
- Publication date Oct 11, 2007
- Ho Seon Shin
- B24 - GRINDING POLISHING
Information Patent Application
Methods for reducing delamination during chemical mechanical polishing
- Publication number 20060172664
- Publication date Aug 3, 2006
- APPLIED MATERIALS, INC.
- Yufei Chen
- B24 - GRINDING POLISHING
Information Patent Application
Methods for reducing delamination during chemical mechanical polishing
- Publication number 20040116052
- Publication date Jun 17, 2004
- APPLIED MATERIALS, INC.
- Yufei Chen
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for cleaning/drying hydrophobic wafers
- Publication number 20020189643
- Publication date Dec 19, 2002
- Yufei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cleaning/drying hydrophobic wafers
- Publication number 20020121290
- Publication date Sep 5, 2002
- APPLIED MATERIALS, INC.
- Jianshe Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scrubber operation
- Publication number 20010035197
- Publication date Nov 1, 2001
- APPLIED MATERIALS, INC.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Systems, methods and apparatus for post-chemical mechanical planari...

Disk-brush cleaner module with fluid jet

Methods for reducing delamination during chemical mechanical polishing

Methods for reducing delamination during chemical mechanical polishing

Scrubber operation

Patents Applicationslast 30 patents

SYSTEMS, METHODS AND APPARATUS FOR POST-CHEMICAL MECHANICAL PLANARI...

SLURRY FOR PLANARIZING PHOTORESIST

SLURRY FOR COBALT APPLICATIONS

DISK-BRUSH CLEANER MODULE WITH FLUID JET

SLURRY COMPOSITION FOR GST PHASE CHANGE MEMORY MATERIALS POLISHING

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

METHODS AND APPARATUS FOR LOW COST AND HIGH PERFORMANCE POLISHING T...

METHODS AND APPARATUS FOR CLEANING A SUBSTRATE EDGE USING CHEMICAL...

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

Methods for reducing delamination during chemical mechanical polishing

Methods for reducing delamination during chemical mechanical polishing

Method and apparatus for cleaning/drying hydrophobic wafers

Method and apparatus for cleaning/drying hydrophobic wafers

Scrubber operation