Yuichi Shiina

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Insulator interposed type plasma processing apparatus
- Patent number 8,999,122
- Issue date Apr 7, 2015
- Ferrotec Corporation
- Yuichi Shiina
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Divided annular rib type plasma processing apparatus
- Patent number 8,833,299
- Issue date Sep 16, 2014
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating apparatus and plasma processing apparatus
- Patent number 8,562,800
- Issue date Oct 22, 2013
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Droplet removing device and method in plasma generator
- Patent number 7,976,612
- Issue date Jul 12, 2011
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generator
- Patent number 7,823,537
- Issue date Nov 2, 2010
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Multiply Divided Anode Wall Type Plasma Generating Apparatus and Pl...
- Publication number 20120037504
- Publication date Feb 16, 2012
- FERROTEC CORPORATION
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIVIDED ANNULAR RIB TYPE PLASMA PROCESSING APPARATUS
- Publication number 20120031337
- Publication date Feb 9, 2012
- FERROTEC CORPORATION
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulator Interposed Type Plasma Processing Apparatus
- Publication number 20110180403
- Publication date Jul 28, 2011
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target Exchange Type Plasma Generating Apparatus
- Publication number 20110109227
- Publication date May 12, 2011
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20110068004
- Publication date Mar 24, 2011
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PE...
- Publication number 20100059369
- Publication date Mar 11, 2010
- Ferrotec Corporation
- Yuichi Shiina
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radially enlarged type plasma generating apparatus
- Publication number 20100018859
- Publication date Jan 28, 2010
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Droplet Removing Device and Method in Plasma Generator
- Publication number 20090026067
- Publication date Jan 29, 2009
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma generator
- Publication number 20070193518
- Publication date Aug 23, 2007
- Ferrotec corporation and Hirofumi Takikawa
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yuichi Shiina

Person

Patents Grantslast 30 patents

Insulator interposed type plasma processing apparatus

Divided annular rib type plasma processing apparatus

Plasma generating apparatus and plasma processing apparatus

Droplet removing device and method in plasma generator

Plasma generator

Patents Applicationslast 30 patents

Multiply Divided Anode Wall Type Plasma Generating Apparatus and Pl...

DIVIDED ANNULAR RIB TYPE PLASMA PROCESSING APPARATUS

Insulator Interposed Type Plasma Processing Apparatus

Target Exchange Type Plasma Generating Apparatus

PLASMA GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS

PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PE...

Radially enlarged type plasma generating apparatus

Droplet Removing Device and Method in Plasma Generator

Plasma generator