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Semiconductor exposure apparatus
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Patent number 5,959,304
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Issue date Sep 28, 1999
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Canon Kabushiki Kaisha
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Toshinobu Tokita
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Mask and mask supporting mechanism
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Patent number 5,825,463
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Issue date Oct 20, 1998
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Canon Kabushiki Kaisha
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Shinichi Hara
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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X-ray mask structure
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Patent number 5,356,686
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Issue date Oct 18, 1994
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Canon Kabushiki Kaisha
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Hidehiko Fujioka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Vacuum chuck
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Patent number 5,191,218
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Issue date Mar 2, 1993
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Canon Kabushiki Kaisha
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Tetsuzo Mori
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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