Yuji Furumura

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming multilayer insulating film of semiconductor device
- Patent number 5,763,005
- Issue date Jun 9, 1998
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a region doped to a level exceeding the...
- Patent number 5,518,937
- Issue date May 21, 1996
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer insulating film of semiconductor device and method for f...
- Patent number 5,506,443
- Issue date Apr 9, 1996
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for forming silicon oxide film
- Patent number 5,314,724
- Issue date May 24, 1994
- Fujitsu Limited
- Atuhiro Tsukune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming tungsten film
- Patent number 5,298,458
- Issue date Mar 29, 1994
- Fujitsu Limited
- Fumitake Mieno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device having a region dope...
- Patent number 5,270,224
- Issue date Dec 14, 1993
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphite columnar heating body for semiconductor wafer heating
- Patent number 5,233,163
- Issue date Aug 3, 1993
- Fujitsu Limited
- Fumitake Mieno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing insulating layer on underlying layer using pla...
- Patent number 5,231,057
- Issue date Jul 27, 1993
- Fujitsu Limited
- Masahiko Doki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having a region doped to a level exceeding the...
- Patent number 5,111,266
- Issue date May 5, 1992
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide barrier between silicon substrate and metal layer
- Patent number 5,103,285
- Issue date Apr 7, 1992
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an X-ray exposure mask
- Patent number 5,082,695
- Issue date Jan 21, 1992
- 501 Fujitsu Limited
- Masao Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing a contact plug
- Patent number 4,906,593
- Issue date Mar 6, 1990
- Fujitsu Limited
- Yoshimi Shioya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a heteroepitaxial semiconductor thin film using a...
- Patent number 4,876,219
- Issue date Oct 24, 1989
- Fujitsu Limited
- Takashi Eshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of growing a single crystalline .beta.-SiC layer on a silico...
- Patent number 4,855,254
- Issue date Aug 8, 1989
- Fujitsu Limited
- Takashi Eshita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for vapor phase deposition
- Patent number 4,510,177
- Issue date Apr 9, 1985
- Fujitsu Limited
- Yuji Furumura
- C30 - CRYSTAL GROWTH
Information Patent Grant
Metal-insulator-semiconductor transistor device
- Patent number 4,509,070
- Issue date Apr 2, 1985
- Fujitsu Limited
- Yuji Furumura
- H01 - BASIC ELECTRIC ELEMENTS

Yuji Furumura

Person

Patents Grantslast 30 patents

Method for forming multilayer insulating film of semiconductor device

Semiconductor device having a region doped to a level exceeding the...

Multilayer insulating film of semiconductor device and method for f...

Process for forming silicon oxide film

Method of forming tungsten film

Method of manufacturing a semiconductor device having a region dope...

Graphite columnar heating body for semiconductor wafer heating

Method of depositing insulating layer on underlying layer using pla...

Semiconductor device having a region doped to a level exceeding the...

Silicon carbide barrier between silicon substrate and metal layer

Method of fabricating an X-ray exposure mask

Method of producing a contact plug

Method of forming a heteroepitaxial semiconductor thin film using a...

Method of growing a single crystalline .beta.-SiC layer on a silico...

Method and apparatus for vapor phase deposition

Metal-insulator-semiconductor transistor device