Yuji Kudo

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Evaluation device and evaluation method
- Patent number 8,705,034
- Issue date Apr 22, 2014
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Evaluation device and evaluation method
- Patent number 8,334,977
- Issue date Dec 18, 2012
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Grant
Projection optical system, exposure system, and exposure method
- Patent number 7,978,310
- Issue date Jul 12, 2011
- Nikon Corporation
- Hironori Ikezawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface inspection method and surface inspection device
- Patent number 7,907,268
- Issue date Mar 15, 2011
- Nikon Corporation
- Yoshihiko Fujimori
- G01 - MEASURING TESTING
Information Patent Grant
Projection optical system, exposure system, and exposure method
- Patent number 7,710,653
- Issue date May 4, 2010
- Nikon Corporation
- Hironori Ikezawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, method of manufacturing projection optic...
- Patent number 7,706,074
- Issue date Apr 27, 2010
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 6,864,959
- Issue date Mar 8, 2005
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator, illumination optical apparatus, exposure appara...
- Patent number 6,741,394
- Issue date May 25, 2004
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 6,710,854
- Issue date Mar 23, 2004
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical exposure apparatus and photo-cleaning method
- Patent number 6,642,994
- Issue date Nov 4, 2003
- Nikon Corporation
- Takashi Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulse-width extending optical systems, projection-exposure apparatu...
- Patent number 6,549,267
- Issue date Apr 15, 2003
- Nikon Corporation
- Yuji Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projection exposure apparatus
- Patent number 6,392,740
- Issue date May 21, 2002
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,377,336
- Issue date Apr 23, 2002
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, exposure apparatus and exposure method
- Patent number 6,281,967
- Issue date Aug 28, 2001
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical exposure apparatus and photo-cleaning method
- Patent number 6,268,904
- Issue date Jul 31, 2001
- Nikon Corporation
- Takashi Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical device and semiconductor device manufacturing...
- Patent number 6,127,095
- Issue date Oct 3, 2000
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,100,961
- Issue date Aug 8, 2000
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, illumination apparatus, and exposure app...
- Patent number 5,986,744
- Issue date Nov 16, 1999
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, an exposure apparatus having the illum...
- Patent number 5,867,319
- Issue date Feb 2, 1999
- Nikon Corporation
- Kayo Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical apparatus and projection exposure apparatus us...
- Patent number 5,798,823
- Issue date Aug 25, 1998
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus correcting illuminance distribution
- Patent number 5,798,824
- Issue date Aug 25, 1998
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical apparatus
- Patent number 5,745,294
- Issue date Apr 28, 1998
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 5,719,704
- Issue date Feb 17, 1998
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical apparatus and method
- Patent number 5,659,429
- Issue date Aug 19, 1997
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Grant
Illuminating optical apparatus for uniformly illuminating a reticle
- Patent number 5,619,376
- Issue date Apr 8, 1997
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Grant
Illuminating optical apparatus
- Patent number 5,610,763
- Issue date Mar 11, 1997
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Grant
Illumination optical system and exposure apparatus including the sa...
- Patent number 5,392,094
- Issue date Feb 21, 1995
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,300,971
- Issue date Apr 5, 1994
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical arrangement
- Patent number 5,253,110
- Issue date Oct 12, 1993
- Nikon Corporation
- Yutaka Ichihara
- G02 - OPTICS
Information Patent Grant
Illuminating optical system and exposure apparatus utilizing the same
- Patent number 5,237,367
- Issue date Aug 17, 1993
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
INSPECTING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130329222
- Publication date Dec 12, 2013
- Yuji Kudo
- G01 - MEASURING TESTING
Information Patent Application
EVALUATION DEVICE AND EVALUATION METHOD
- Publication number 20130070244
- Publication date Mar 21, 2013
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
Evaluation device and evaluation method
- Publication number 20110235038
- Publication date Sep 29, 2011
- Nikon Corporation
- Kazuhiko Fukazawa
- G01 - MEASURING TESTING
Information Patent Application
SURFACE INSPECTION METHOD AND SURFACE INSPECTION DEVICE
- Publication number 20100177312
- Publication date Jul 15, 2010
- Yoshihiko Fujimori
- G01 - MEASURING TESTING
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD
- Publication number 20100159401
- Publication date Jun 24, 2010
- Nikon Corporation
- Hironori Ikezawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Method and Apparatus, and Electronic Device Manufacturing...
- Publication number 20090011368
- Publication date Jan 8, 2009
- Yutaka Ichihara
- G02 - OPTICS
Information Patent Application
Projection Optical System, Method of Manufacturing Projection Optic...
- Publication number 20080123086
- Publication date May 29, 2008
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Application
Illumination Optical Equipment, Exposure System and Method
- Publication number 20070222962
- Publication date Sep 27, 2007
- Nikon Corporation
- Yuji Kudo
- G02 - OPTICS
Information Patent Application
Projection optical system, exposure system, and exposure method
- Publication number 20070188879
- Publication date Aug 16, 2007
- Nikon Corporation
- Hironori Ikezawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical integrator, illumination optical apparatus, exposure appara...
- Publication number 20040125459
- Publication date Jul 1, 2004
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Pulse-width extending optical systems, projection-exposure apparatu...
- Publication number 20030117601
- Publication date Jun 26, 2003
- NIKON CORPORATION
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20020140919
- Publication date Oct 3, 2002
- NIKON CORPORATION
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus
- Publication number 20020048008
- Publication date Apr 25, 2002
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination apparatus, exposure apparatus and exposure method
- Publication number 20010046039
- Publication date Nov 29, 2001
- Nikon Corporation
- Yuji Kudo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical exposure apparatus and photo-cleaning method
- Publication number 20010030740
- Publication date Oct 18, 2001
- NIKON CORPORATION
- Takashi Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Evaluation device and evaluation method

Evaluation device and evaluation method

Projection optical system, exposure system, and exposure method

Surface inspection method and surface inspection device

Projection optical system, exposure system, and exposure method

Projection optical system, method of manufacturing projection optic...

Projection exposure apparatus

Optical integrator, illumination optical apparatus, exposure appara...

Projection exposure apparatus

Optical exposure apparatus and photo-cleaning method

Pulse-width extending optical systems, projection-exposure apparatu...

Projection exposure apparatus

Projection exposure apparatus

Illumination apparatus, exposure apparatus and exposure method

Optical exposure apparatus and photo-cleaning method

Illuminating optical device and semiconductor device manufacturing...

Projection exposure apparatus and method

Projection optical system, illumination apparatus, and exposure app...

Illumination optical system, an exposure apparatus having the illum...

Illumination optical apparatus and projection exposure apparatus us...

Exposure apparatus correcting illuminance distribution

Illuminating optical apparatus

Projection exposure apparatus

Illuminating optical apparatus and method

Illuminating optical apparatus for uniformly illuminating a reticle

Illuminating optical apparatus

Illumination optical system and exposure apparatus including the sa...

Projection exposure apparatus

Illumination optical arrangement

Illuminating optical system and exposure apparatus utilizing the same

Patents Applicationslast 30 patents

INSPECTING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

EVALUATION DEVICE AND EVALUATION METHOD

Evaluation device and evaluation method

SURFACE INSPECTION METHOD AND SURFACE INSPECTION DEVICE

PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM, AND EXPOSURE METHOD

Exposure Method and Apparatus, and Electronic Device Manufacturing...

Projection Optical System, Method of Manufacturing Projection Optic...

Illumination Optical Equipment, Exposure System and Method

Projection optical system, exposure system, and exposure method

Optical integrator, illumination optical apparatus, exposure appara...

Pulse-width extending optical systems, projection-exposure apparatu...

Projection exposure apparatus

Projection exposure apparatus

Illumination apparatus, exposure apparatus and exposure method

Optical exposure apparatus and photo-cleaning method